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Reference point talbot encoder

An encoder and optical encoder technology, applied in the field of optical encoders, can solve problems such as accuracy impact

Inactive Publication Date: 2005-02-16
GSI卢姆莫尼克公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] A problem with such known downsized encoders is that the downsizing often negatively affects their accuracy

Method used

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  • Reference point talbot encoder
  • Reference point talbot encoder
  • Reference point talbot encoder

Examples

Experimental program
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Embodiment Construction

[0026] figure 1 Shows a perspective view of a diffractive optical encoder 100 constructed in accordance with the present invention. As shown in the figure, the encoder 100 includes three basic elements: a photoelectric component or a detection head 110; a scale 160 and a signal processor 190.

[0027] FIG. 2A shows a side view of the encoder 100. As shown in FIG. Figure 2B This shows a view of the probe 110 taken in the direction of the line 2B-2B shown in FIG. 2A. FIG. 2C shows a view of the scale 160 taken along the direction of the line 2C-2C shown in FIG. 2A. FIG. 2D shows an end view of the encoder 100 taken in the direction of the line 2D-2D shown in FIG. 2A. For ease of description, the signal processor 190 is not shown in FIGS. 2A-2D.

[0028] Refer to figure 1 And 2A-2D, the detection head 110 includes a light source 112, a main detector array 120, and a mark or reference point detector 140. As shown in the figure, the light source 112 and the detectors 120 and 140 ar...

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Abstract

The application discloses an optical encoder, including a scale and a detection head. The scale includes an optical element. The detection head includes a light source, a detector array and a mark detector all arranged on the substrate. The scale is set to be opposite to the probe head, and is set to be movable relative to the probe head. Select the distance between the scale and the detector head so that the detector array is close to the talbot imaging plane. The light source emits a divergent beam of light directed towards the scale. The grating diffracts the light of the diverging beam towards the detector array. Optical elements diffract light from the diverging beam toward the marker detector. The detector array measures the position of the probe head relative to the scale. Marker detectors provide a reference measurement of the position of the probe head relative to the scale.

Description

[0001] Related application reference [0002] This application relates to the title "HARMONIC SUPPRESSINGPHOTODETECTOR ARRAY" [Attorney Docket No. MCE-018(111390-140)] that was assigned to the assignee of this application and submitted at the same time as this application. The US patent application with serial number No. 60 / 316,121 is under examination. The full text of the application is hereby incorporated by reference. Background technique [0003] This application relates to an optical encoder. Specifically, the present invention relates to an improved reference point optical encoder. [0004] Diffractive optical encoders are well known in the field of displacement detection systems. Such devices are available from the assignee of the present invention and from a number of other manufacturers. U.S. Patent Nos. 5,559,600 and 5,646,730 describe examples of known optical encoders. [0005] The recent development trend is the development of reduced-size diffraction-based encoders. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D5/245G01D5/36G01D5/38
CPCG01D5/38G01D5/366G01D5/2457
Inventor 威廉·G·索伯恩诺曼·J·托比梅尔文·J·J·特尔道格拉斯·A·克林拜尔拉尔夫·A·凯利埃尔
Owner GSI卢姆莫尼克公司