Fluid jet device and manufacturing method
A technology of fluid jetting and manufacturing method, applied in the direction of printing, etc., can solve the problems of inkjet offset, inability to be in an ideal state, affecting printing quality, etc.
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Embodiment 1
[0066] See Figure 5A versus Figure 5D , Describe the structural features of the fluid ejection device of this embodiment. among them Figure 5D for Figure 5A Figure is a cross-sectional view taken along 5D-5D. Such as Figure 5D As shown, the fluid ejection device has an opening 66 formed at the end 68 of the fluid cavity 54. The opening 66 passes through the structural layer 56 and communicates with the end 68 of the fluid cavity through the pressure relief hole 64. The equivalent radius of the pressure relief hole 64 is It is smaller than the nozzle 62. Next as Figure 5A As shown, in this embodiment, since a silicon substrate with a lattice arrangement direction of [110] is selected as the substrate (the present invention is not limited to this), the end of the etched fluid cavity presents a pyramid shape, and the opening 66 is a rectangle , And the pressure relief hole 64 is a triangle.
[0067] See next Figure 5D To illustrate the detailed structure of the fluid ejection ...
Embodiment 2
[0079] See Figure 6 versus Figure 5D Describe the structural features of the fluid ejection device of this embodiment, where Figure 5D for Figure 6 The section view taken along 5D-5D, such as Figure 5D As shown, the fluid ejection device has an opening 66 formed at the end 68 of the fluid cavity 54. The opening 66 passes through the structural layer 56 and communicates with the end 68 of the fluid cavity through the pressure relief hole 64. The equivalent radius of the pressure relief hole 64 is Smaller than the nozzle hole 62, then Figure 6 As shown, since the substrate 50 of this embodiment uses a silicon substrate with a lattice arrangement direction of [100], the end of the etched fluid cavity is rectangular, the opening 66 is a pyramid shape, and the pressure relief hole 64 is a triangle. The difference between this embodiment and Embodiment 1 is that Embodiment 1 uses a silicon substrate with a lattice arrangement direction of [110], while this embodiment uses a silico...
Embodiment 3
[0082] See Figure 7A versus Figure 7D Describe the structural features of the fluid ejection device of this embodiment, where Figure 7D for Figure 7A The section view taken along 7D-7D, such as Figure 7D As shown, the fluid ejection device has a diversion channel 84 formed on at least one side of the space of the fluid cavity 82, and the diversion channel 84 is formed by a diversion protrusion 86' that extends into the fluid cavity 82 and is separated from the fluid cavity 82. , Wherein the width of the guide channel 84 is less than half of the width of the fluid cavity 82.
[0083] See next Figure 7D To illustrate the detailed structure of the fluid ejection device of this embodiment, the fluid ejection device includes a substrate 80, a fluid cavity 82, a flow channel 84, a structure layer 86, a flow guide bump 86', a protective layer 88 and a nozzle hole 90.
[0084] The structural layer 86 covers the base 80 and the fluid cavity 82, the diversion bump 86' is the part of t...
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Abstract
Description
Claims
Application Information
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