Unlock instant, AI-driven research and patent intelligence for your innovation.

Deposition system using noise canceller and its method of control

A technology of noise canceller and deposition system, applied in deposition system and its control field, can solve problems such as unsatisfactory film thickness

Active Publication Date: 2010-05-26
SAMSUNG DISPLAY CO LTD
View PDF4 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This results in an unfavorable thickness of the formed film

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Deposition system using noise canceller and its method of control
  • Deposition system using noise canceller and its method of control
  • Deposition system using noise canceller and its method of control

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0017] Figure 1 is a diagram of the deposition system. Referring to FIG. 1 , the deposition system includes a deposition device 10 , a deposition rate sensor 20 and an energy supply unit 30 . The deposition apparatus 10 includes an evaporator and an injector. The deposition rate sensor 20 measures the deposition rate of the deposition apparatus 10 . The energy supply unit 30 adjusts the energy supplied to the deposition device according to the deposition rate of the deposition device 10 measured by the deposition rate sensor 20 . A crystal sensor that measures the deposition rate using a crystal whose frequency is inversely proportional to the applied weight is used as the deposition rate sensor 20 . The deposition rate measured by the deposition rate sensor 20 includes noise due to electric waves, noise due to power lines, noise due to fluctuation of cooling water flow rate, and noise due to movement of deposition sources. Therefore, when the deposition rate measured by th...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A deposition system and its method of control cancels the influence of noise occurring during measuring of a deposition rate using a noise canceller in order to exactly control the deposition rate, and obtains a film of a desired thickness. The deposition system includes a deposition device. A deposition rate sensor measures a deposition rate of the deposition device. A noise canceller cancels a noise component of the measured deposition rate. A power supply unit adjusts power supplied to the deposition device according to an output of the noise canceller.

Description

[0001] claim priority [0002] This application references, incorporates, and claims priority to three earlier applications filed with the Korean Intellectual Property Office on January 6, 2005, assigned serial numbers 10-2005-0001086, 10-2005-0001087, and 10- 2005-0001088. technical field [0003] The present invention relates to a deposition system and a control method thereof, and more particularly, to a deposition system that uses a noise eliminator to eliminate the influence of noise generated in the process of measuring a deposition rate to precisely control a deposition rate, and a method for controlling the deposition system . Background technique [0004] The deposition system includes a deposition device, a deposition rate sensor and an energy supply unit. Deposition equipment includes evaporators and injectors. The deposition rate sensor measures the deposition rate of the deposition apparatus. The energy supply unit adjusts the energy supplied to the depositi...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C14/54
CPCA61B1/00064A61B1/00188A61B1/0684A61B1/0692
Inventor 黄珉婷
Owner SAMSUNG DISPLAY CO LTD