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General view test device and general view test method

A technology of an appearance inspection device and a photographing device, which is applied to measurement devices, optical devices, instruments, etc., can solve the problem of high cost, and achieve the effects of reducing device cost, shortening time, and improving inspection resolution.

Inactive Publication Date: 2006-08-30
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In order to prevent such erroneous detection, it is necessary to use a high-resolution displacement sensor, but the high cost is the main reason for increasing the price of the visual inspection device itself

Method used

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  • General view test device and general view test method

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Embodiment Construction

[0030] A visual inspection device according to an embodiment of the present invention will be described with reference to the drawings. and also, figure 1 It is a plan view and a front view schematically showing the overall structure of the visual inspection device. Here, for a concrete description, a case where a film mask on which a wiring pattern is drawn is used as an inspection object will be described as an example. In addition, the present invention is not limited to film masks, and is effective for inspection of a flexible thin-plate-shaped member such as a glass mask, a printed circuit board, and a flexible thin-plate-shaped substrate as an object to be inspected.

[0031] exist figure 1 Among them, the appearance inspection device 1 generally has a stage conveying mechanism part 2, an imaging mechanism part 3, and a control part 4 (refer to figure 2 ). The stage transport mechanism unit 2 has a stage unit 21 , a rotation unit 22 , a Y-axis direction drive mechan...

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PUM

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Abstract

Provided a visual inspection device and a visual inspection method. A stage part 21 is constituted so as to form a stage surface on which a thin plate-shaped inspection target having flexibility is placed to hold one main side of the placed inspection target and the stage surface in a close contact state. An imaging camera 31 takes the image of the inspection target held to the stage surface in the close contact state. An X-axis direction drive mechanism 35, a Y-axis direction drive mechanism 23 and a Z-axis direction drive mechanism 36 are constituted so as to relatively move at least on of the stage surface and the imaging camera 31 in the respective directions of them. A control part 4 controls the X-axis direction drive mechanism 35, the Y-axis direction drive mechanism 23 and the Z-axis direction drive mechanism 36 on the basis of the displacement data at a plurality of positions on the stage surface while holding an equal distance between the imaging camera 31 and the stage surface.

Description

technical field [0001] The present invention relates to an appearance inspection device and an appearance inspection method, in particular to an appearance inspection device and an appearance inspection device for performing appearance inspection by photographing a flexible thin plate member such as a printed circuit board or a film mask with a camera. Inspection Method. Background technique [0002] On the surface of a printed circuit board or the like on which electronic components and the like are mounted, conductor wiring necessary for constituting a predetermined circuit is patterned. Furthermore, the presence or absence of defects in the wiring pattern formed on the printed circuit board is visually inspected by the visual inspection device. For example, the printed circuit board is mounted on the stage of the visual inspection device with the surface on which the pattern is formed as the upper surface. The visual inspection device has a camera such as a CCD (Charged...

Claims

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Application Information

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IPC IPC(8): G01N21/956H05K3/00
CPCG01B11/2545G01N21/95684G01N2021/5957G01N2223/6113
Inventor 赤木佑司万代一郎小堀由高加藤知孝
Owner DAINIPPON SCREEN MTG CO LTD