Method of repairing disconnection, method of manufacturing active matrix substrate by using thereof, and display device

An active matrix and substrate technology, applied in the field of display devices and manufacturing active matrix substrates, can solve the problems of display defects, data signal wiring affecting pixel electrode voltage, etc., and achieve the effect of reducing display defects and improving output
CN1862320AInactive Publication Date: 2006-11-15NEC LCD TECH CORP
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
NEC LCD TECH CORP
Publication Date
2006-11-15
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

A part where a wiring is disconnected is repaired by the laser CVD method while active matrix substrates for liquid crystal display devices and organic electroluminescence display devices are being manufactured. By the laser CVD method, a conductive film is selectively formed in the part where the wiring is disconnected. Thereafter, laser light is irradiated on at least a surrounding area of the conductive film, and thus conductive fine particles remaining in the surrounding area of the conductive film are removed therefrom. As a result, a leak current and parasitic capacity can be inhibited from occurring between the part where the disconnection has been repaired and another wiring.
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Description

technical field

[0001] The present invention relates to a method for repairing disconnection of wiring formed on a substrate. In particular, the present invention relates to a method of manufacturing an active matrix substrate using the method of repairing a disconnection, and to a display device including the same method. Background technique

[0002] Liquid crystal display devices using thin film transistors (hereinafter referred to as "TFTs") as switching elements have been widely used. Amorphous silicon (hereinafter referred to as "a-Si") is mainly used for semiconductor films of TFTs. In addition, a liquid crystal display device using polysilicon for a semiconductor film of TFT has been commercialized. Further, organic electroluminescence display devices in which pixel circuits are composed of polysilicon TFTs have been developed.

[0003] Active matrix display devices such as liquid crystal display (LCD) devices and organic electroluminescent (EL) display devices al...

Claims

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