Rotary table device

Abstract

The invention provides a rotary table device. The rotary table device can fully meet all the requirements of axial and radial vibration accuracy, high resolution, thin profile, and medium-to-large size. Equipped with a guide device and a rotary table mounted on the guide device, the guide device is provided with an annular integrated rail (11) without a discontinuity in the direction of travel, and with respect to the rail (11) by a pair of The structure of a plurality of guide blocks (12) on the surface assembly; the opposite side of the above-mentioned opposite surface of the above-mentioned track (11) is engaged with the lower surface of the above-mentioned rotary table (14). The rail (11) has a substantially L-shaped cross section having a vertical portion and a horizontal portion extending radially from the upper end of the vertical portion in the radial direction of the rotary table. The belt scale as the detected part (16a) of the detection mechanism (16) is arranged on the outer peripheral surface of the above-mentioned track (11)

Description

Technical field [0001] The present invention relates to a high-precision rotary table device suitable for mounting an inspection device such as an X-ray inspection device for high-precision inspection. Background technique [0002] As an example of such a conventional rotary table device, there are rotary table devices disclosed in Patent Documents 1 and 2. The rotary table device disclosed in Patent Document 1 is configured to include a base, a rotary table that is installed on the base and rotates around a predetermined center of rotation, and a rotary guide provided between the base and the rotary table. The guide part and a rotation drive source that rotates the rotary table through the rotation guide part. In addition, the rotation guide portion has a structure including a ring-shaped endless rail composed of a plurality of rail members and a plurality of guide devices sliding on the rail, and a rotating table is mounted on the plurality of guide devices. [0003] In additio...

AI Technical Summary

Problems solved by technology

[0006] The rotary table device described in the above-mentioned Patent Document 1 is a structure in which a plurality of guide blocks (sliding tables) on which the rotary table is mounted slide on a ring-shaped (circular) endless track, but since the endless track is composed of many Consists of one rail component, so there is a connection between the rail component and the rail component, and it is inevitable that there will be a slight step difference. In addition, since the endless track is composed of multiple track components, it is impossible to obtain the high-precision coaxiality of the endless track.

Therefore, there is a problem that the axial and radial vibrations are large, and a high-precision rotary table device cannot be obtained.

[0007] In addition, the rotary table device described in Patent Document 2 is better in terms of axial and radial vibration accuracy than Patent Document 1 in terms of using an integrated endless track. The guide block, so the rolling grooves of the endless rail and the guide block are not arranged at symmetrical positions on the left and right in the cross section, etc. Due to the special structure used in the endless rail and the guide block, it is difficult to obtain high precision.

In addition, since the cross section of the endless rail is approximately rectangular, when the endless rail is mounted on a fixed base (base), it is necessary to process the surface of the endless rail for mounting screw holes, etc. When the block passes through the processing part, it is affected by the slight torque fluctuation caused by the sliding contact of the sealing members installed at both ends of the processing part, and it is impossible to obtain a high-precision rotary table device.

[0008] In addition, as such a rotary table device, in addition to the devices described in the above-mentioned Patent Documents 1 and 2, there are, for example, a cross roller guide type, an angular contact support type (Agara type), and a tapered roller type. devices, but none of them can fully meet all the requirements of axial and radial vibration accuracy, high resolution, thin, medium and large size

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