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Cover loading and unloading device for conveying containers

A technology for loading and unloading devices and containers, applied in the directions of transportation and packaging, packaging, conveyor objects, etc., can solve the problems of unusable wafers and a lot of time

Inactive Publication Date: 2007-02-07
RIGHT MFG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] In this case, the automatic line is stopped, it takes a lot of time to recover, and the lid of the returned shipping container is manually opened in a room with low cleanliness, and in this case, the expensive wafers contained in the shipping container will become unusable

Method used

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  • Cover loading and unloading device for conveying containers
  • Cover loading and unloading device for conveying containers
  • Cover loading and unloading device for conveying containers

Examples

Experimental program
Comparison scheme
Effect test

no. 1 Embodiment approach

[0041] figure 1 , figure 2 It is a figure which shows the 1st Embodiment of the cap attachment and detachment apparatus of the transport container of this invention, figure 1 It is a perspective view showing an outline, figure 2 is the main view.

[0042]This lid attaching and detaching device 10 for a transport container includes: a partition 11; an opening 12; a door 13 for opening and closing the opening 12 of the partition 11; a latch mechanism 14 having two positioning pins 14a, 14b and two T-shaped keys. 14c, 14d, the lid 203 of the transport container 200 is opened and closed.

[0043] In 1st Embodiment, the door 13 has the board|substrate 13A, and the alignment plate 13B which is movable in the surface direction so that it may align with respect to this board|substrate 13A.

[0044] In addition, inside the door 13 are provided: four fine adjustment mechanisms 20 ; two centering mechanisms 30 ; four position maintaining mechanisms 40 ; two eccentric transmission...

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PUM

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Abstract

A cover attaching / detaching device of carry container capable of releasing the locking of a cover member even if a rectangular engagement groove part is slightly displaced in a previous step or during transfer from the previous step, comprising a T-shaped key (14c) having a head part (141) and a neck part (142) functioning as the rotating shaft of the head part (141). The head part (141) further comprises four diagonal sides (143) in which both sides thereof in longitudinal direction are converged from the center part toward the tip parts thereof. The T-shaped key (14c) comprises chamfered parts (144) formed at the tip parts of the diagonal sides (143).

Description

technical field [0001] The present invention relates to a lid attachment and detachment device for a transport container, which accommodates thin substrates such as semiconductor wafers and transports them, which is installed in a clean room and whose lids are attached and detached while maintaining mutual cleanliness. Background technique [0002] Figure 19 It is a figure which shows an example of the cap attachment and detachment apparatus of the conventional conveyance container. [0003] The conventional lid attaching and detaching device 100 for transport containers has: a partition 101 that partitions a space A with a high degree of cleanliness and a space B with a low degree of cleanliness; Cleanliness space B; door 103, opening and closing the opening 102 of the partition 101; latch mechanism 104, having two positioning pins 104a, 104b and two T-shaped keys 104c, 104d arranged on the door 103, latching The cover 203 of the transport container 200 and the workbench ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/68B65D85/86E05B65/02E05B65/00H01L21/673H01L21/677
CPCE05B65/006H01L21/67772H01L21/67373
Inventor 永田龙彦
Owner RIGHT MFG