Magnetic recording medium and magnetic recording apparatus
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example 1
[0050]FIG. 2 is a cross sectional view of the configuration of one embodiment of a magnetic recording medium of the present invention. As a substrate 11, a 0.635 mm-thick and 2.5-dia type aluminosilicate glass substrate of which surface had been chemically reinforced was used. This substrate was subjected to alkali cleaning. Subsequently, the following multi-layered film was formed with a tact of 9 sec by means of a sheet-fed type sputtering apparatus (NDP250B) manufactured by Intervac Co. The chamber configuration or the station configuration of this sputtering apparatus is shown in FIG. 3. First, in a charging chamber 20, the substrate 11 was kept under vacuum, and in a first underlayer forming chamber 21, first underlayers 12 each made of a 30 nm-thick Ni-37.5 at % Ta alloy were formed on both the sides of the substrate 11. Thereafter, in a heating chamber 22, heating was conducted in a mixed gas atmosphere of an Ar gas and oxygen by a lamp heater so that the temperature of the s...
example 2
[0061] Media each having the same layer configuration as that in Example 1, except that a Co-24 at % Ru-10 at % B alloy was used as the lower magnetic layer were formed through the same deposition process as that in Example 1. Table 4 shows the combinations of the thickness of the lower magnetic layer and the thickness of the upper magnetic layer, and Table 5 shows the magnetic characteristics thereof. From the comparison between the magnetic characteristics shown in Tables 2 and 5, it has been shown that, when the same thickness is adopted for each upper magnetic layer, use of the Co-24 at % Ru-10 at % B alloy provides larger Hc, Br·t, and Ku·v / kT than with the use of Co-24 at % Ru-8 at % B alloy for the lower magnetic layer.
[0062] The electromagnetic transfer characteristics of disks having their respective magnetic characteristics of Table 5 were evaluated by using the magnetic head used for the disk evaluation in Example 1. As a result, as shown in Table 6, it has been shown as...
example 3
[0065] Media each having the same layer configuration as that in Example 1 were formed, except for changing (1) the substrate temperature, (2) the thickness of the CrTi underlayer, and (3) the thickness of the Ru intermediate layer. The deposition process was the same as that in Example 1, except that the Ar gas pressure during deposition of the lower magnetic layer was set at 0.93 Pa. Tables 7 to 9 show the relationship between the layer configuration of each medium and the sample number, the magnetic characteristics, and the electromagnetic transfer characteristics. Incidentally, a head having a Twr=0.35 μm was used for the evaluation of the electromagnetic transfer characteristics. Any of the media showed a high coercivity of 260 kA / m or more, and a low normalized media noise of 0.04 μVrms / μVpp or less.
TABLE 7SubstrateLower magnetic layerIntermediateUpper magnetic layerSampletemperatureSecond underlayerCo-24 at %layerCo-18 at % Cr-14 at %No.(° C.)Cr-20 at % Ti (nm)Ru-8 at % B (...
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Abstract
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