Flow measuring device
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first embodiment
Modified Examples of First Embodiment
[0085]FIG. 18 is a cross-sectional view illustrating a modified example of the first embodiment. According to a flow measuring device 91, as compared to the case of the first embodiment, the distance between the orifice supporting spacer 65 and the flow channel wall 54 is slightly decreased, and the end surface of the orifice supporting spacer 65 and the end surface of the flow channel wall 54 are slightly recessed from the front end surface of the main flow channel portion 55a. Then, a resilient members 92 such as an O-ring is sandwiched between the end surface of the orifice supporting spacer 65 and the end surface of the flow channel wall 54 and the back surface of the end cap 68, thereby press-tightening the resilient member 92. According to this modified example, as the orifice supporting spacer 65 can be pressed against the orifice 63 by resilient repulsion of the resilient member 92, it is possible to make the orifice 63 to be held without...
second embodiment
[0094]FIG. 23 is a cross-sectional view illustrating a flow measuring device 101 according to a second embodiment of the present invention. FIG. 24 is a partially broken perspective view illustrating the flow channel block 52 that is used for the flow measuring device 101. FIG. 25A is a perspective view illustrating the orifice supporting spacer 65 that is used for the flow measuring device 101.
[0095]According to the flow measuring device 101, as shown in FIG. 25A, the cut-out section 66 is formed not along the entire orifice supporting spacer 65 such that the cut-out section 66 is shorter than the orifice supporting spacer 65. On the other hand, as shown in FIG. 24, within the main flow channel 53 of the flow channel block 52, leaving the flow channel wall 54 having the same shape and size as the cut-out section 66, the spacer container 74 is formed at the remaining area. The branch entrance 72a opens in the flow channel wall 54, and a distance sufficient for not influencing the fl...
third embodiment
Modified Examples of Third Embodiment
[0100]FIG. 27 is a partially broken perspective view illustrating a modified example of the third embodiment. According to a flow measuring device 103, each of the front and back orifice supporting spacers 65 is formed by a number of short orifice supporting spacers 65c. It is desirable to use the orifice supporting spacers 65c of the same length.
[0101]According to this modified example, it is possible to freely change the position of the orifice 63 depending on a gap out of gaps between the orifice supporting spacers 65c in which the orifice 63 is inserted, thereby adjusting the flow ratio. It should be noted that such as a gas flow straightener can be sandwiched between the orifice supporting spacers 65c.
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