Optical deflecting device
a technology of optical deflector and axis, which is applied in the direction of optics, optical elements, instruments, etc., can solve the problems of unstable operation of the device, difficulty in switching the inclination direction of the plate-like member in the optical deflector,
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[0024]Referring now to the drawings, wherein like reference numerals designate identical or corresponding parts throughout the several views, preferred embodiments of the present invention are described.
[0025]FIG. 1A and FIG. 1B are diagrams schematically illustrating an exemplary structure of an optical deflecting device according to an embodiment of the present invention.
[0026]FIG. 1A illustrates the optical deflecting device without a plate-like member, and FIG. 1B illustrates the optical deflecting device with the plate-like member. The optical deflecting device includes a substrate 101, an insulating film 102, a plurality of electrodes 103, a fulcrum member 106, a plate-like member 107, and a regulation member 108. The plate-like member 107 has a light reflective area formed on an upper surface thereof and a conductor layer formed at least on part of a backside thereof to oppose the electrodes 103.
[0027]The plate-like member 107 rests on the fulcrum member 106 as illustrated in...
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