The invention discloses a manufacture method of an array type high-
voltage LED device, which comprises the steps of: manufacturing a
mask on a P type
gallium nitride layer with an epitaxial structure, selectively
etching the epitaxial structure to form an N type step structure; manufacturing a
mask on the surface of an N type
gallium nitride layer with an epitaxial structure, forming isolated
deep trench; carrying out high-temperature
sulfur phosphoric acid corrosion; depositing an insulation
dielectric layer on the surface of the etched epitaxial structure; corroding the insulation
dielectric layer outside the side wall of the
deep trench; manufacturing a transparent conductive layer between adjacent N type step structures; partially corroding the transparent conductive layer on the surface of the P type
gallium nitride layer on the N type step structure on the outermost side; and manufacturing a P
metal electrode and an N
metal electrode on the transparent conductive layer. According to the invention,
electrode light absorption can be reduced, the light outlet area on the epitaxial side surface and the bottom of the
chip is increased, the manufacture method is mutually matched with a post process, and thus the light emitting efficiency of a high-
voltage LED
chip can be increased.