To easily correct the position of leads in
semiconductor devices. [Solution] In the photoelectron spectrum on the Si side (center), there is no
significant difference for (5) to (8), which correspond to a region deeper than the center of the Ni
silicide layer. However, in (1) to (4), which are shallower and within 50 nm from the surface, in Example (b), the Ni in the photoelectron spectrum... x In comparative example (a), a region of localized
high intensity (
small peak) is observed at higher energies than the main peak corresponding to Si, whereas these small peaks are not visible in comparative example (a). The energy in this region corresponds to SiO2 and SiO2. x This corresponds to (x<2). In other words, in Example (b),
silicon oxide is formed at these depths, whereas in Comparative Example (a), such
silicon oxide is not formed.