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50results about How to "Does not affect exposure" patented technology

Light effect of fluorescent diode in soilless cultivation root system environment

InactiveCN1493184AEliminates issues such as growing organismsEliminates problems such as organisms that hinder plant growthSaving energy measuresAgriculture gas emission reductionIt equipmentEngineering
An optical effect of LED in root system environment of soiless cultivation is disclosed. Its equipment is composed of dripping head, basins, lighting system, base basin, water circulation system with immersible pump in it, plastic tube as central axis, and LED boards arranged under said basin, in which the plant is growing via the holes on its bottom. Its method is use of the LED as light source to directly radiate the root system of plant.
Owner:SHANGHAI INST OF BIOLOGICAL SCI CHINESE ACAD OF SCI

3D stacked image sensor

The invention discloses a 3D stacked image sensor. The 3D stacked image sensor comprises a pixel array, an analog-to-digital conversion unit array and a memory array. The image sensor is composed of an upper layer chip and a lower layer chip stacked up and down. The pixel array includes a plurality of pixel units for converting an optical signal into an analog electrical signal and is located on the upper layer chip. The analog-to-digital conversion unit array includes a plurality of analog-to-digital conversion units for converting the analog electrical signals into digital electrical signalsand is located on the lower layer chip. The memory array includes a memory cell array and a logic circuit array, the memory cell array includes a plurality of memory cells for storing the converteddigital electrical signals, the logic circuit array includes a plurality of logic circuits for controlling reading and writing of the memory cells; and the memory array is located at the lower layer chip. The image sensor frame rate can be improved.
Owner:SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT

Photocatalytic evaluation characterization device and method for carbon dioxide reduction

The invention discloses a photocatalytic evaluation characterization device and method for carbon dioxide reduction. The device comprises a photocatalysis mechanism, a gas path mechanism, a water vapor generation mechanism and a gas chromatograph, the photocatalysis mechanism comprises a blast drying box, a light source part, a catalytic reactor and a vacuum pump, the catalytic reactor comprises areaction tank, a four-corner supporting frame, an inlet pipeline part and an outlet pipeline part, and the four-corner supporting frame comprises an activated carbon carrying net and supporting legs.The method comprises the following steps of: 1, preparing a photocatalyst; 2, connecting and debugging the device; 3, filling the photocatalyst; 4, performing preparation before reaction; 5, carryingout photocatalytic reduction reaction on carbon dioxide; 6, detecting the concentration of methane gas and the concentration of carbon monoxide gas; and 7, obtaining the optimal photocatalyst for preparing methane and the optimal photocatalyst for preparing carbon monoxide. The photocatalytic evaluation characterization device and method for carbon dioxide reduction are reasonable in design, andimprove the accuracy of photocatalytic evaluation characterization of carbon dioxide reduction.
Owner:XIAN UNIV OF SCI & TECH

Flat panel detector

The invention provides a flat panel detector and belongs to the field of flat panel detectors. The invention aims to solve the problem that acquired image electric signals are abnormal due to the influence of the external static electricity of an amorphous silicon X-ray flat panel detector. The flat panel detector comprises a substrate, a plurality of photodiodes arranged on the substrate, and signal lines which are arranged on one sides, far away from the substrate, of the photodiodes and are connected with the photodiodes; the flat panel detector further comprises transmission conducting layers arranged on one sides, away from the substrate, of the photodiodes; and the orthographic projections of the transmission conducting layers on the substrate are overlapped with the orthographic projections of the photodiodes on the substrate.
Owner:BOE TECH GRP CO LTD +1

Measuring system and measuring method considering focusing and leveling and precision alignment

ActiveCN111381460ARealize online misalignment detectionRealize online gap detectionPhotomechanical treatmentEngineeringGrating
The invention discloses a measuring system considering focusing and leveling and precision alignment and a measuring method thereof. The system is characterized in that a dark field moire fringe alignment deviation detection function and a chirped grating gap detection function are integrated into one group of detection units. According to the measurement system considering alignment and focusingleveling, an integrated structure of a vertical measurement system and a horizontal measurement system is realized, the space requirement of a photoetching machine complete machine system is reduced,and the space occupation rate of a photoetching machine is reduced. According to the measuring method of the measuring system considering alignment and focusing leveling, the focusing leveling and alignment of the substrate are achieved, and the working efficiency of a photoetching machine is improved.
Owner:INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI

Automobile headlamp module

The invention discloses an automobile headlamp module, which comprises a mounting housing which can be fixedly mounted on an automobile. A mounting space is formed in the mounting housing. When a first motor is started, the first motor drives a helical tooth rod to rotate; the helical tooth rod rotates to drive the lamp holder to slide in the mounting space; when the lamp holder slides towards theleft side, the lamp holder can be taken out from the mounting space; after being installed on a vehicle body, internal parts can be rapidly replaced, and a large amount of dismounting work is not needed, so that the labor amount is reduced, and the safety of internal circuits is protected; the lampshade can be cleaned, and irradiation of lamplight cannot be affected; and internal water can be dried, and the internal circuits are protected against influences.
Owner:佛山氙明智能科技有限公司

Technique for constructing water-saving moisture-preserving maintenance film and geogrid combined maintenance cement stabilizing structural layer

InactiveCN105178151AAvoid rapid temperature changesLight in massRoads maintainenceLap jointSoil science
The invention provides a technique for constructing a water-saving moisture-preserving maintenance film and geogrid combined maintenance cement stabilizing structural layer. According to the technique, high-hydroscopicity water-saving moisture-preserving maintenance film is used as a covering article, a geogrid is pressed on the maintenance film, and thus maintenance of a cement stabilizing structure is achieved. The technique specifically comprises the operating steps that the cement stabilizing structural layer is tightly covered with the water-saving moisture-preserving maintenance film, the maintenance film is covered with the geogird, and the geogird is pressed every 5-10 meters. According to the technique, by using the water-saving moisture-preserving maintenance film, escape of heat generated by absorbing sun irradiation and heat generated when the cement stabilizing structure hydrates in daytime can be effectively slowed down, and meanwhile the rising and falling speeds of the maintenance temperature can be regulated; the adopted geogrid is light, is a plastic planar net material having certain flexibility and can be sheared and connected on site easily, geogrids can also be in lap joint in an overlapped mode, and construction is easy and convenient; the construction technique has the characteristics that water is saved by multiple times, efficient moisture preservation is achieved, a good moisture preservation effect is achieved, construction is convenient, the period is short, cost is low, and environmental friendliness is achieved; the construction period can be effectively shortened, and construction cost is reduced.
Owner:SHANXI ROAD & BRIDGE CONSTR GROUP

Railway signal lamp monitoring equipment and working method thereof

The invention discloses railway signal lamp monitoring equipment, which comprises a support rod, a mounting plate and a plurality of signal lamps, and is characterized in that the mounting plate is transversely mounted on one side of the top of a support rod, and the signal lamps are rotationally mounted in the mounting plate; a plurality of mounting holes is formed in the mounting plate in a penetrating mode, rotating shafts are rotatably mounted on one sides of the interiors of the mounting holes, and clamping heads are connected to one ends of the rotating shafts; the signal lamps can normally emit light for use. Rain, snow and dust are not easy to cover the exterior of the signal lamps, and light emitted by the signal lamps can keep high intensity and definition. Therefore, the signallamps can be normally used in various environments, and the application range is wider. After a water absorption pad absorbs water, the sweeping head can sweep and extrude the water absorption pad, sothat the water absorption pad can be normally recycled, and the signal lamps can be continuously subjected to water absorption sweeping.
Owner:LIUZHOU RAILWAY VOCATIONAL TECHN COLLEGE

Flow field-temperature field synchronous measurement system under narrow rectangular channel blocking condition

The invention provides a flow field-temperature field synchronous measurement system under a narrow rectangular channel blocking condition, which comprises a 1-3 mm narrow rectangular channel formed by a heating plate and a visual PC endurance plate, a buffer chamber, an upper bearing plate, a middle bearing plate and a lower bearing plate of the fixed narrow rectangular channel, a laser incidentwindow, a spectroscope, an optical filter, a laser, a high-speed camera, a synchronizer, an acquisition system and the like, wherein blocking objects with different sizes and shapes are arranged at different positions of the narrow rectangular channel through silica gel, so that the blocking working condition in a reactor is simulated. A Particle Image Velocimetry (PIV) technology and a Laser Induced Fluorescence (LIF) technology are adopted to measure a flow field and a temperature field, three laser incident windows are arranged on two sides of the middle bearing plate for laser irradiation,the synchronizer is used for controlling two high-speed cameras, a visualization section is divided into three areas under the action of the spectroscope and the optical filter to carry out synchronous shooting of the flow field and the temperature field, and the acquisition system records experimental data of the flow field and the temperature field in real time. The flow field-temperature fieldsynchronous measurement system under the narrow rectangular channel blocking condition is simple and feasible, and has low cost and wide range of research working conditions.
Owner:HARBIN ENG UNIV

Marine active phased array radar

The invention discloses a marine active phased array radar, and belongs to the field of radar system design. The marine active phased array radar mainly comprises a radar host and a servo turntable, wherein the radar host mainly comprises an active phased array antenna, a radio frequency processing unit, a digital intermediate frequency unit, a digital processing unit and a power supply unit. The active phased array radar provided by the invention can effectively discover and track far and near distance targets on the sea surface.
Owner:无锡海工智能科技有限公司

Solar photovoltaic panel connecting and detaching mechanism based on water surface

The invention discloses a solar photovoltaic panel connecting and detaching mechanism based on a water surface. The solar photovoltaic panel connecting and detaching mechanism comprises a mounting base plate, and mounting columns are symmetrically connected to the outer side of the mounting bottom plate. One ends of the mounting columns are connected with a floating plate, the bottom ends of the mounting columns are connected with a sealing base plate, and a weighting bottom bin is mounted at the bottom end of the sealing base plate. The solar photovoltaic panel connecting and detaching mechanism is scientific and reasonable in structure and is safe and convenient to use. By arranging a fixed bottom ring, a telescopic connecting column, a placement spring and a placement circular plate, the shock reduction protection can be performed on the placement circular plate. By combining a telescopic connecting seat connected with the bottom end of the placing circular plate, the shake generated by the mounting bottom plate can be absorbed, so that the influence of the waves on the water surface on a solar photovoltaic panel can be reduced. Through the arrangement of a driving motor, a transmission teeth, a rotating teeth, a connecting inner tooth seat, a connecting inner gear and a crank, the position of a lifting and placing plate can be adjusted through the operation of the driving motor, and the position of the lifting and placing plate can also be manually adjusted through the rotation of the crank.
Owner:长兴新亚环保机械科技股份有限公司

Energy router of distributed power station

The invention relates to the technical field of energy routers, particularly to an energy router of a distributed power station. The energy router comprises a base, a protection device, a monitoring device and a lifting device, wherein the inner side of the base is provided with the lifting device, the lifting device comprises a support frame, the bottom end surface of the energy router is slidably connected with the support frame, the support frame is slidably connected with the base, the inner side of support frame is fixedly connected with a hydraulic rod, the hydraulic rod is fixedly connected with the base, and the top end of the lifting device is provided with the energy router. According to the invention, through the arrangement of the protection frame, the fixed connection of the protection frame and the fixed rod, the rotary connection of the threaded shaft and the clamping block and the sliding connection of the clamping block and the limiting block are matched, when the device is used in cold weather in winter, the snow and rain blocking effect is achieved, so that the device is well protected, irradiation of light to the device is not affected, and the phenomenon that the device cannot be normally used due to the low temperature is avoided.
Owner:HXXN ELECTRICITY

Tail gas treatment device of automobile engine

The invention relates to the technical field of environmental protection equipment, and discloses a tail gas treatment device of an automobile engine. The tail gas treatment device comprises a shell, an air inlet pipe and an exhaust pipe, wherein the air inlet pipe and the exhaust pipe are respectively installed on the middle parts of the left side surface and the right side surface of the shell, a door sheet is installed on the top of the shell, a first isolation plate and a second isolation plate are installed in the shell from left to right, air holes are respectively formed in the surfaces of the first isolation plate and the second isolation plate, two clamping grooves are formed in the left side of the inner wall of the bottom surface of the shell, and the two clamping grooves are respectively located in the left sides of the first isolation plate and the second isolation plate. According to the tail gas treatment device of the automobile engine, a first filter element, a second filter element, an ultraviolet lamp and a photocatalyst are arranged, automobile tail gas is filtered and deodorized by utilizing the first filter element and the second filter element, harmful gas and fungi in the automobile tail gas are sterilized and purified by utilizing the ultraviolet lamp and the photocatalyst, and multiple stages of purification are performed, so that the purification is complete.
Owner:合肥长兴汽车配件有限公司

Environment-friendly street lamp

The invention discloses an environment-friendly street lamp and relates to the field of street lamps. The environment-friendly street lamp comprises a street lamp top seat and an inner cover arrangedon the street lamp top seat; the inner cover is wrapped with an outer cover which is arranged on the street lamp top seat; a cleaning mechanism is arranged outside the outer cover and fixed to the street lamp top seat and comprises a rainwater collecting box, a water pump arranged on the side wall of the rainwater collecting box and a water spraying portion connected with the water outlet end of the water pump; the rainwater collecting box is fixed to the street lamp top seat; the water spraying portion comprises a water distribution pipe connected with the water outlet end of the water pump;the two ends of the water distribution pipe communicate with water outlet pipes; the tail end of each water outlet pipe is provided with a bag and a spray head which is provided with a plurality of water outlet holes; elastic parts are arranged in the connection positions of the water distribution pipe and the water outlet pipes; and the elastic parts comprise springs which make the water distribution pipe communicate with the water outlet pipes. The elastic parts are disposed in the connection positions of the water distribution pipe and the water outlet pipes, so that elastic movement of thewater outlet pipes is achieved, and the situation that the water outlet pipes move to the horizontal position when a lampshade is not cleaned is avoided, so that lamplight illumination is not affected.
Owner:成都尚智恒达科技有限公司

Aquatic product airing equipment

The invention relates to the technical field of aquatic product processing, in particular to aquatic product airing equipment. The equipment comprises a base and four universal wheels and further comprises a controller, a rainproof mechanism, an airing mechanism and a drainage mechanism, the airing mechanism comprises an airing disc, a placing assembly, an angle adjusting assembly and two verticalplates, the rainproof mechanism comprises a driving assembly and two baffles, the drainage mechanism comprises an adjusting plate, two traction assemblies and two limiting assemblies, the two limiting assemblies are symmetrically arranged at the end, away from the vertical plates, of the adjusting plate, the airing disc is located between the adjusting plate and the two baffles, and the angle adjusting assembly and the driving assembly are electrically connected with the controller. The aquatic product airing equipment has good drainage effect and better insect expelling effect, and no pollution is caused. Meanwhile, the airing angle can be automatically adjusted according to the illumination intensity, water such as grease generated during airing can be discharged in time, and taking isconvenient after airing.
Owner:李明磊

Method for using catalysts in microwave field

The invention discloses a method of using catalysts in a microwave field. According to the method of the invention, a metal net, solid catalysts and a spot welding machine are employed; the metal netwraps the outer surfaces of the solid catalysts; and the spot welding machine welds the metal net to fix the metal net into a plate-shaped material which then can be directly installed in a microwavecavity of waste gas treatment equipment. According to the invention, a traditional photocatalyst, a traditional thermal catalyst and carriers thereof are packaged in the metal net which is then fixedin the microwave ultraviolet waste gas treatment cavity; since the metal net can reflect microwaves, the catalysts cannot absorb microwave energy and are thus prevented from ignition or combustion; meanwhile, irradiation of ultraviolet light and passing of airflow are not affected, so the selection range of catalysts, carriers and carrier bed materials in the microwave field can be greatly widened, and equipment manufacturing cost is reduced.
Owner:陕西青朗万城环保科技有限公司

Solar street lamp with light gathering structure

The invention provides a solar street lamp with a light gathering structure. The lamp comprises a lamp pole, a lamp body, a connecting rod and a solar panel, and further comprises a light gathering cover and a fixed seat, wherein the fixed seat is fixedly connected to the top of the lamp pole; the light gathering cover is obliquely arranged on the fixed seat; the top of the light gathering cover is open; a bottom plate is arranged at the bottom of the light gathering cover; a transparent shielding plate is arranged at the top of the light gathering cover; the solar panel is fixedly arranged onthe bottom plate of the light gathering cover; the diameter of the solar panel is smaller than that of the bottom plate; a vent plate is formed between the solar panel and the bottom plate; and a vent hole is formed in the vent plate. The light gathering cover is arranged on the solar panel, so that the solar panel can receive more solar energy and the power generation efficiency of the solar panel is greatly improved; and the transparent shielding plate is arranged on the light gathering cover to prevent influence on normal use of the solar panel and the light gathering cover due to the factthat fallen leaves, garbage and accumulated snow in the autumn and winter seasons are stacked in the light gathering cover.
Owner:JIANGSU MINGYU NEW ENERGY RESOURCES

Energy saving environment-friendly garbage can having sterilizing and disinfecting functions

PendingCN107200191ASolve the problem of breeding bacteria and bringing safety hazards to peopleHas the function of sterilization and disinfectionWaste collection and transferRefuse receptaclesUltravioletEngineering
The invention relates to the technical field of environment-friendly devices and discloses an energy saving environment-friendly garbage can having sterilizing and disinfecting functions. The energy saving environment-friendly garbage can having sterilizing disinfecting functions comprises a box body and a box door; the box door is mounted on the front surface of the box body, the top of the box door is provided with a garbage throwing opening, support legs are fixedly connected on the four corners of the bottom of the box body, the top of the box body is fixedly connected to a mounting plate by a support block, a solar cell panel is mounted on the upper surface of the mounting plate, a barrel body is mounted in the box body, placing grooves are arranged in the inner walls of the two sides of the box body, and ultraviolet lamp tubes are mounted in the placing grooves. According to the energy saving environment-friendly garbage can having sterilizing disinfecting functions, by arranging through holes and the ultraviolet lamp tubes, ultraviolet rays radiated by the ultraviolet lamp tubes are used for sterilizing garbage in the barrel body, germ breeding in the box body is prevented, safety of people is protected, solar energy is used for power generation, occurrence of mains supply power generation is changed, and greater environment-friendly and energy saving effects are realized.
Owner:南京新侨鑫环保科技有限公司

Lampshade suitable for street road lamp

The invention discloses a lampshade suitable for street lamps, which comprises a street lamp lamp holder and a street lamp lamp shade arranged on the street lamp lamp holder. device, the water washing device is fixed on the lamp holder of the street lamp, the water washing device includes a water storage tank, a water pump arranged on the side wall of the water storage tank, and a water spray mechanism connected to the water outlet of the water pump, the water storage tank is fixed on the street lamp lamp holder, and the water spray mechanism includes a The water distribution pipe connected to the water outlet end of the water pump, the two ends of the water distribution pipe are connected with a water outlet pipe, the end of the water outlet pipe is provided with a water bag and a nozzle, the nozzle is provided with a number of water outlet holes, and the joint between the water distribution pipe and the water outlet pipe is provided with an elastic member, The elastic component includes a spring, and the spring communicates the water distribution pipe with the water outlet pipe. Elastic parts are provided at the junction of the water distribution pipe and the water outlet pipe to realize the elastic movement of the water outlet pipe, so as to prevent the water outlet pipe from moving to a horizontal position when the lampshade is not cleaned without affecting the light irradiation.
Owner:成都草寓住房租赁有限公司

Landscape acoustic barrier

PendingCN108221725ABlock the noise transmission pathNoise canceling effect is good and beautifulNoise reduction constructionSteel frameEngineering
A landscape acoustic barrier is mainly set on an expressway, a railway, urban rail transit and other lines that passing through heavily populated resident areas and is used for reducing the adverse effect of noise upon residents along the lines. The landscape acoustic barrier comprises a steel frame, connectors, transparent plates and a top yurt decoration; the steel frame includes side steel frames and a top arc steel frame; the two side steel frames are connected through the top arc steel frame; each side steel frame includes two transverse steel frames and a plurality of oblique steel frames, the oblique steel frames are connected between the two transverse steel frames, the oblique steel frames are intersected, the oblique steel frames and the two transverse steel frames from square cells and triangular cells, and the bottoms of the oblique steel frames are connected with the transverse steel frames through saddle connectors; the transparent plates or decorative plates in Chinese knot shape are connected to the square cells; air baffles are arranged at the lower triangular cells, and the transaprent plates are arranged at the upper triangular cells; the oblique steel frames arebent in arc shape. The landscape acoustic barrier can effectively block a noise propagation path and has excellent denoising effect.
Owner:SHANXI SHANGFENG TECH

Preparation method of metal grid line

The invention discloses a method for preparing a metal grid line. The method comprises the steps that a solar cell chip to be interconnected is provided, wherein the cell chip comprises a flexible substrate and a transparent conductive film layer arranged on one side of the flexible substrate; the upper surface of the transparent conductive film layer is laminated with a release film with width larger than the width of the cell chip; according to a set grid line pattern, the release film is laser-ablated to form a grid line pattern with a first trench penetrating the thickness of the release film on the release film; the transparent conductive film layer is scribed through the first trench; a second trench is formed on the transparent conductive film layer; the second trench and the firsttrench on the release film directly facing the transparent conductive film layer are collinearly aligned and communicated; metal layers are simultaneously deposited in the first trench and the secondtrench to form the metal grid line with the set grid line pattern. According to the invention, the method of burying a grid by laser is adopted, which improves the reliability of a cell and the conversion efficiency of the cell.
Owner:上海祖强能源有限公司

Lifting-type environment-friendly street lamp

The invention discloses a liftable environment-friendly street lamp, which relates to the field of street lamps and includes a top base of the street lamp, a light pole, and an inner and outer cover and a cleaning mechanism arranged on the top base of the street lamp. The cleaning mechanism includes a rainwater collection box, a water pump and a water spray The rainwater collection box is fixed on the top seat of the street lamp. The water spray part includes a water distribution pipe connected to the water outlet end of the water pump. The two ends of the water distribution pipe are connected with a water outlet pipe. The water outlet hole, the connection between the water distribution pipe and the water outlet pipe is provided with an elastic part, the elastic part includes a spring, and the spring connects the water distribution pipe with the water outlet pipe, and the light pole is coated with an anti-sticking coating. The invention solves the problem that the cleaning brushes of the existing self-cleaning street lamps will also cover the street lamps in the next cleaning after each cleaning, and the existing street lamp posts are pasted with advertising paper by advertisers every day. At the same time, Addresses the fact that rainfall varies from region to region and season, and that collected rainwater may not be sufficient.
Owner:成都尚智恒达科技有限公司

Stage lighting system

The invention relates to the technical field of stage lighting, in particular to a stage lighting system. According to the stage lighting system, smoke generated after use on a stage can be emitted in time, and irradiation of stage lighting is not affected. According to the technical scheme, the stage lighting system comprises a stage lighting computer control unit, a stage lighting computer execution unit, a stage lighting unit and a stage lighting device, and the stage lighting computer control unit is connected with the stage lighting computer execution unit. The stage lighting computer execution unit is connected with a stage lighting device, and a stage lighting unit is arranged on the stage lighting device.
Owner:王玉年

Enhanced photoresist structure based on glass fibers and manufacturing method thereof

The invention discloses an enhanced photoresist structure based on glass fibers and a manufacturing method of the enhanced photoresist structure. The structure includes: glass fibers; and a photoresist, wherein the glass fiber is coated with the photoresist. Compared with the prior art, the enhanced photoresist structure based on the glass fibers has the following advantages: 1) the tensile modulus and breaking strength of the photoresist are improved, so the application of the photoresist as a structural material to an MEMS technology is expanded; 2) the photoresist is guaranteed to have highutilization rate of light energy, and the composite structure has no influence on photosensitive characteristics of the photoresist; 3) the exposure and development modes of the photoresist are not changed, and photoetching forming of the photoresist is not affected; 4) exposed glass fibers can be removed by a hydrofluoric acid wet method; and 5) the method is simple in process and low in cost.
Owner:SHANGHAI JIAO TONG UNIV

A kind of automobile headlamp module

The invention discloses an automobile headlight module, which comprises a mounting shell that can be fixedly mounted on the automobile, and an mounting space is arranged in the mounting shell. When a first motor is activated, the first motor drives the helical gear rod to rotate, The rotation of the helical gear rod can drive the lamp holder to slide in the installation space. When the lamp holder slides to the left, the lamp holder can be taken out from the installation space, and can be installed on the vehicle body when replacing the internal parts. , can be replaced quickly, no need for a lot of disassembly work, reduce labor, protect the safety of the internal circuit, can clean the lampshade, will not affect the illumination of the light, the internal moisture can be dried, protect the internal circuit from being damaged will be affected.
Owner:佛山氙明智能科技有限公司

A Measuring System and Measuring Method Considering Focusing, Leveling and Precise Alignment

ActiveCN111381460BRealize online misalignment detectionRealize online gap detectionPhotomechanical treatmentGratingEngineering
The invention discloses a measurement system and a measurement method that take into account both focusing, leveling and precise alignment. The characteristic of this system is that the dark field Moire fringe alignment deviation detection function and the chirped grating gap detection function are integrated into a set of detection units. The measurement system that takes into account alignment, focus and leveling realizes the integrated structure of the vertical measurement system and the horizontal measurement system, reduces the space requirement of the whole system of the lithography machine, and saves the space occupancy rate of the lithography machine . The measurement method of the measurement system that takes into account both alignment and focus adjustment and leveling realizes the focus adjustment, leveling and alignment of the substrate, and improves the working efficiency of the photolithography machine.
Owner:INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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