Manufacturing method of stack-up dielectric ceramic component
A piezoelectric ceramic element and a manufacturing method technology, which are applied in the manufacture/assembly of piezoelectric/electrostrictive devices, electrical components, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve the deterioration of piezoelectric ceramic properties , entry and other problems, to achieve the effect of improving piezoelectric characteristics and reliability, ensuring reliability, and improving the degradation of piezoelectric characteristics
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Embodiment 1
[0045] Prepare Pb first 3 o 4 、TiO 2 , ZrO 2 , SrCO 3 as an initial raw material. Then, in order to get the composition as Pb 0.98 Sr 0.02 (Zr 0.45 Ti 0.55 )O 3 The above-mentioned piezoelectric ceramic composition was weighed and wet-mixed with a ball mill. The above mixture is then dehydrated, dried, calcined at 800° C. for 2 hours, and crushed to obtain a calcined powder.
[0046] Then, additives such as an acrylic organic binder, an organic solvent, and a plasticizer are added to the calcined powder, and wet mixing is performed with a ball mill to obtain a slurry.
[0047] This slurry was tape-cast to form a ceramic green sheet about 40 µm thick.
[0048] A conductive paste containing a conductor with a ratio of Ag / Pg=80% by weight / 20% by weight was coated on the ceramic green sheet by screen printing, so that the thickness after sintering was 1.0 to 3.0 μm, and dried to obtain a A ceramic green sheet with layers for internal electrodes.
[0049] Thereafter, t...
Embodiment 2
[0076] Prepare Pb first 3 o 4 、TiO 2 , ZrO 2 , Nb 2 o 5 , NiO and Fe 2 o 3 as an initial raw material. Then, in order to obtain Pb containing 99% by weight as the main component 100 {Ni 1 / 3 Nb 2 / 3} 0.40 Zr 0.25 Ti 0.35}O 3 and 1% by weight of Fe as an addition 2 o 3 The above-mentioned piezoelectric ceramic composition was weighed and wet-mixed with a ball mill.
[0077] The above mixture is then dehydrated, dried, calcined at 800° C. for 2 hours, and crushed to obtain a calcined powder.
[0078] Then, by the same method as in the above-mentioned Example 1, the target multi-layer piezoelectric actuator 10 as shown in FIGS. 1 and 2 was obtained.
[0079] Calculate the piezoelectric deformation coefficient |d of these stacked piezoelectric regulators 31 | and the resistivity ρ of the piezoelectric ceramic. The results are listed in Table 3.
[0080] In addition,|d 31 |It is obtained by measuring the amount of deformation with a laser Doppler vibrometer and c...
Embodiment 3
[0099] Prepare Pb first 3 o 4 、TiO 2 , ZrO 2 , SrCO 3 as an initial raw material. Then, in order to get the composition as Pb 0.98 Sr 0.02 (Zr 0.45 Ti 0.55 )O 3 The above-mentioned piezoelectric ceramic composition was weighed and wet-mixed with a ball mill.
[0100] The above mixture is then dehydrated, dried, calcined at 800° C. for 2 hours, and crushed to obtain a calcined powder.
[0101] Then, additives such as an acrylic organic binder, an organic solvent, and a plasticizer are added to the calcined powder, and wet mixing is performed with a ball mill to obtain a slurry.
[0102] This slurry was tape-cast to form a ceramic green sheet about 40 µm thick.
[0103] A conductive paste containing a conductor with a ratio of Ag / Pd=80% by weight / 20% by weight was coated on the ceramic green sheet by the screen printing method so that the thickness after sintering was 1.0 to 3.0 μm, and dried to form a A ceramic green sheet with layers for internal electrodes.
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