Non-contact measuring method and system for thickness and width
A non-contact measurement and width technology, applied in the field of geometrical optical non-contact measurement, can solve the problems of difficult objective lens design, manufacture and assembly, difficult to obtain high precision, low system reliability, etc., and achieve simple and convenient debugging and maintenance. Measurement dynamic range, system stability and good performance
Inactive Publication Date: 2008-05-07
SOUTH CHINA UNIV OF TECH
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Problems solved by technology
The prior art has the following problems in design, manufacture and practicality: 1. The scanning measurement method needs an appropriate linear scanning objective lens, and the structure is more complicated; 2. The objective lens design, manufacture and assembly of the scanning measurement method are all relatively difficult, so the production efficiency is low , High manufacturing cost; 3. The scanning measurement system has high environmental requirements when used, and the system reliability is not high in the general production site environment; 4. The expansion of the scanning measurement range is limited by the size of the scanning objective lens; 5. Based on the imaging principle Measurement technology requires that the position between the workpiece and the measurement system is relatively fixed, it is difficult to obtain high precision, and it is also difficult to realize a portable structure
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[0024] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.
[0025] As shown in Figure 1, a kind of thickness / width non-contact measurement system of the present invention is by collimating laser source 1, asymmetrical scanning rotating mirror (composed of reflective surface 2, 3, each reflective surface is respectively to the distance of scanning rotation center unequal), the receiving objective lens 5, and the photoelectric receiver 6 are sequentially connected to each other, and the photoelectric receiver 6 is also connected to the computer through a signal line. A reflection mirror for changing the direction of the light beam can also be added between the asymmetrical scanning mirror and the collimated light source 1 . The receiving objective lens 5 adopts reflection type or refraction type or a combination of both. Before the photoelectric receiver 6, an optical filter or a dustproof protective gl...
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Light beam from collimated light source through dissymmetrical scanning rotation mirror forms a scanning light beam. Reflected / scattered by workpiece to be measured, the said scanning light beam is converged to photoelectric receiving component by receiving object lens. Measuring duration of reflected / scattered light on the workpiece to be measured obtains thickness and width of the workpiece to be measured from specific measurement equation. The system is composed of collimated light source, dissymmetrical scanning rotation mirror, receiving object lens, photoelectric receiving component connected in order. The photoelectric receiving component through signal wire is connected to computer. Features are: system error can be compensated actively by computer; good stability, easy to be installed and maintained; and possible to be made in portable mode.
Description
technical field [0001] The invention relates to the technical field of optical non-contact measurement of geometric quantities, in particular to a thickness / width non-contact measurement method and system. Background technique [0002] The existing optical non-contact thickness / width measurement technology can be divided into scanning measurement and imaging measurement. Scanning measurement method and system: It consists of a collimated light source, a reflecting mirror, a scanning objective lens, a receiving objective lens and a photoelectric device. Measure the light, and calculate the thickness / width of the measured workpiece by measuring the time when the scanning light scans the cross section of the workpiece. Imaging measurement method and system: use a light source to illuminate the workpiece, calculate the thickness of the workpiece by measuring the workpiece image on the photoelectric array device, or use the flying image scanning method (that is, set a rotating m...
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IPC IPC(8): G01B11/02G01B11/26
Inventor 马国欣
Owner SOUTH CHINA UNIV OF TECH