Large area VHF-PECVD reaction chamber special-shaped electrode capable of obtaining even electric field
A uniform electric field and large-area technology, applied in the field of special-shaped electrodes in large-area VHF-PECVD reaction chambers, can solve problems affecting the uniformity of potential distribution and achieve the effect of solving the uniformity of potential distribution
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Embodiment 1
[0037] Schematic diagram of arc shaped electrode structure ( Figure 4 shown).
[0038] In this example, the rectangular parallel plate electrode has a length of L=120cm, a width of W=80cm, and a height of H=10cm. The side four-terminal symmetrical feed-in method is adopted. The centers of the four power feed-in ports are located at the horizontal midline of the long side of the electrode L. The distance between the centers of the ports is 70 cm; an arc-shaped electrode is attached to one side of each port, forming a plane with the rectangular electrode, which is directly opposite to the substrate plane in the reaction chamber. The arc-shaped electrode has a radius of 15 cm, a thickness of 1 cm, and a height of 9 cm. The planar shape of arc-shaped special-shaped electrode is as follows: Figure 5 shown.
[0039] The excitation frequency power supply of 40.68MHz is applied, and the four-terminal equal-phase and equal-amplitude power is fed in. Using the special-shaped elect...
Embodiment 2
[0041] Rectangular I special-shaped electrode structure ( Figure 7 shown).
[0042] In this example, the rectangular parallel plate electrode has a length of L=120cm, a width of W=80cm, and a height of H=10cm. The side four-terminal symmetrical feed-in method is adopted. The centers of the four power feed-in ports are located at the horizontal midline of the long side of the electrode L. The distance between the centers of the ports is 70cm; a small rectangular electrode is attached to one side of each port, forming a plane with the large-area rectangular electrode, and this plane is directly opposite to the substrate plane in the reaction chamber. The length of the small rectangular electrode is 30cm, the width is 8cm, and the thickness is 1cm, and its long outer edge is less than the length edge of the power electrode. The plane shape of the rectangular I special-shaped electrode is shown in figure 8.
[0043] The excitation frequency power supply of 40.68MHz is applied, ...
Embodiment 3
[0045] Rectangular II special-shaped electrode structure ( Figure 10 shown)
[0046] In this example, the rectangular parallel plate electrode has a length of L=120cm, a width of W=80cm, and a height of H=10cm. The side four-terminal symmetrical feed-in method is adopted. The centers of the four power feed-in ports are located at the horizontal midline of the long side of the electrode L. The distance between the centers of the ports is 70cm; a small rectangular electrode is attached to one side of each port, forming a plane with the large-area rectangular electrode, and this plane is directly opposite to the substrate plane in the reaction chamber. The small rectangular electrode has a length of 40 cm, a width of 8.5 cm, and a thickness of 1 cm, and its long outer edge overlaps the length edge of the power electrode. Rectangular II special-shaped electrode planar shape such as Figure 11 shown.
[0047] The excitation frequency power supply of 40.68MHz is applied, and the...
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