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High voltage automatic discharge device for ion implanter

An ion implanter and automatic discharge technology, applied in the direction of discharge tubes, circuits, electrical components, etc., can solve the problems of inconvenient operation and use of hand-held discharge rods, low safety and reliability, etc.

Inactive Publication Date: 2009-08-05
BEIJING ZHONGKEXIN ELECTRONICS EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The present invention aims at the disadvantages of inconvenient operation and low safety and reliability of the hand-held discharge rod

Method used

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  • High voltage automatic discharge device for ion implanter

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Embodiment Construction

[0011] The present invention will be further described below in conjunction with the accompanying drawings, but not as a limitation of the present invention.

[0012] When the high voltage area of ​​the ion implanter is in working condition, the door of the high voltage area is closed, the cylinder 9 of the discharge device is extended, and the discharge rod 5 is pushed to rotate by the push block 3 to leave the discharge position. When the high-voltage zone door was opened, the air cylinder 9 would deflate under the pneumatic interlocking condition, and the push block 3 would return, and the discharge rod 5 would swing to be short-circuited with the ground wire under the action of self-gravity to discharge. Push block 3 is made with nylon 6, plays wear-resisting and insulating effect.

[0013] The high-voltage automatic discharge device of the invention converts the stroke of the cylinder into the rotation of the discharge rod, and can realize automatic pneumatic chain contro...

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Abstract

The invention is a device for quickly releasing residual high voltage and static electricity, which is used for releasing residual high voltage and static electricity in the high-voltage chamber or high-voltage area machine room frame of an ion implanter, including a bottom plate, a pressing block, a pushing block, a fixing seat, a discharge rod, Composed of pan head screws, hexagon socket head cap screws and cylinders.

Description

technical field [0001] The invention is a device for quickly releasing residual high voltage and static electricity, which is used for releasing residual high voltage and static electricity in a high-voltage chamber or a machine room in a high-voltage area of ​​an ion implanter, and belongs to the field of semiconductor equipment. Background technique [0002] The ion implanter is a kind of particle accelerator. Some equipment is in a high-potential working area, and its potential is basically related to the acceleration energy. It is necessary to quickly release the residual high voltage and the static electricity generated by the high voltage from the high-voltage area. The residual high voltage is not released. Personnel may be injured. At present, most ion implanters in China use a hand-held grounding discharge rod. When working in a high potential area, the grounding discharge rod must be held by hand to release residual high voltage and static electricity. Contents o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/317H01L21/265H01L21/425
Inventor 伍三忠彭立波孙雪平何科峰文超
Owner BEIJING ZHONGKEXIN ELECTRONICS EQUIP