Flat panel display with integrated double flat grid array structure and its producing process

Abstract

The invention relates to a flat-panel display with an integrated double flat grid array structure and its manufacturing process, including a sealed vacuum chamber composed of a cathode panel, an anode panel and surrounding glass frames; layer and the phosphor layer prepared on the anode conductive layer; there is an integrated double flat grid array structure and a grown carbon nanotube cathode on the cathode panel; the supporting wall structure and the auxiliary components of the getter make an integrated double flat grid array The structure, on the one hand, makes full use of the good field emission characteristics of the carbon nanotubes prepared by the direct growth method, on the other hand, the grid and the cathode are highly integrated together, which further reduces the working voltage of the overall device, and has the advantages of fabrication The invention has the advantages of stable and reliable process, simple manufacturing process, low manufacturing cost and simple structure.

Description

technical field [0001] The invention belongs to the fields of plane display technology, microelectronic science and technology, vacuum science and technology, and nano science and technology, and relates to the manufacture of flat panel field emission displays, in particular to flat panels for carbon nanotube cathodes. The content of device fabrication of field emission display, especially relates to field emission flat display with integrated double planar grid array structure, carbon nanotube cathode and its fabrication process. Background technique [0002] Carbon nanotubes have a small tip curvature radius, extremely high aspect ratio and excellent electrical conductivity, and are an ideal cold cathode material. When an appropriate voltage is applied to the carbon nanotubes, a strong electric field strength will be formed on the surface of the carbon nanotubes, forcing the carbon nanotubes to emit a large number of electrons, which is the field emission phenomenon. This...

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Problems solved by technology

On the one hand, most devices use special insulating materials to make the gate structure, which not only includes a fairly complicated device manufacturing process, but also covers the development and utilization of new technologies, resulting in high overall device manufacturing costs; Realizing simple process, stable and reliable, and low-cost device fabrication is the basic requirement of flat-panel devices and a prerequisite for practical product applications; on the other hand, the current flat-panel display The distance between the cathodes of nanotubes is very large, which not only increases the manufacturing cost of the overall device, but the effect on further reducing the operating voltage of the device is not obvious. This is a realistic problem worthy of researchers' attention

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