Multifunctional magnetic coupling driver and vacuum equipment thereby

Abstract

The invention discloses a multifunctional magnetic coupling driver and vacuum equipment thereby, and belongs to the field of vacuum equipment. The multifunctional magnetic coupling driver comprises anexternal main pipe and a strong magnet clamping cover sheathed to the external main pipe, wherein the strong magnet clamping cover comprises an external sleeve and a bar-shaped permanent magnet; thebar-shaped permanent magnet and the external main pipe are arranged in the same direction; the bar-shaped permanent magnet comprises a first magnet and a second magnet, wherein the first magnet is fixedly arranged on the outer wall of the external main pipe; the second magnet is fixedly arranged on the inner wall of the external sleeve; and the magnetic pole of the first magnet and the magnetic pole of the second magnet are arranged in the same direction. By use of the technical scheme, the bar-shaped permanent magnet is divided into the first magnet and the second magnet, wherein the first magnet and the second magnet are arranged in the same direction and are independently positioned on the external main pipe and the external sleeve, the external sleeve can rotate to enable the axial positions of the first magnet and the second magnet to be staggered, and therefore, the emission area of a magnetic induction line is increased so as to increase the emission amount of the magnetic induction line.

Description

technical field

[0001] The invention belongs to the field of vacuum equipment, and specifically relates to a multifunctional magnetic coupling driver and vacuum equipment using the driver. Background technique

[0002] The existing magnetic coupling vacuum driver has a high eccentricity when moving over a long distance, and cannot work independently. The customer needs to leave enough space for the installation of auxiliary tools for the product at the beginning of the design. The internal space and resources of the vacuum cavity are wasted, and the pre-evacuation time of the vacuum cavity is increased. Due to the need for auxiliary tools to complete the work, the installation of the product is too cumbersome and requires professionals to complete the installation. There are relatively rigid process or design requirements for the objects that need to be worked, which makes the production not flexible enough. The design of the strong magnetic ferrule is too bulky, and it is...

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