Magnetic bias film and magnetic sensor using the same
A magnetic sensor and magnetic bias technology, which is applied to the size/direction of the magnetic field, the use of electromagnetic devices for magnetic field measurement, and the direction of the magnetic layer.
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no. 1 Embodiment
[0039] figure 1 It is a plan view of the magnetic bias film in the first embodiment of the present invention. This magnetic bias film 9 includes a plurality of magnetic bias magnets 9A to 9G, and these magnetic bias magnets 9A to 9G each generate a magnetic field in the direction along the arrow A (x direction).
[0040] The magnetic bias magnets 9A to 9G are made of a CoPt alloy, and have a substantially rectangular parallelepiped shape in which the long side, short side, and thickness (in the lamination direction) become shorter in order. Here, "approximately" a rectangular parallelepiped means not only a mathematically perfect rectangular parallelepiped, but also refers to, for example, curvature, ridgelines or rounded or chamfered corners at the vertex, surface Concave and convex, etc., but still in the shape of a cuboid as a whole. Among them, due to the limitation of manufacturing technology, the bottom area of the magnetic bias magnets 9A-9G is larger than the top ...
no. 2 Embodiment
[0061] image 3 It is a perspective view of the magnetic bias film in the second embodiment of the present invention. exist image 3 Among them, the magnetic bias film 11 has a structure in which magnetic layers 12 and non-magnetic layers 13 are alternately laminated in multiple layers. Here, the magnetic layer 12 is made of a CoPt alloy, and by magnetizing in a fixed direction, a magnetic field is generated in the direction of the arrow A (x direction). The nonmagnetic layer 13 is made of Cr. Strictly speaking, Cr is an antiferromagnetic (antfferromagnetic) body and not a non-magnetic body, but considering that it is not a ferromagnetic body, the term "non-magnetic" is also used for Cr below.
[0062] The length of each side in this embodiment, the long side (x direction) is 700 μm, the short side (y direction) is 140 μm, and the magnetic layer 12 of thickness (z direction) is The non-magnetic layer 13 is The aspect ratio of the long side to the short side of the magne...
no. 3 Embodiment
[0089] Figure 7 It is a perspective view of the magnetic bias film in the third embodiment of the present invention. The magnetic bias film 11 in the third embodiment of the present invention includes a plurality of magnetic bias magnets 11A to 11C, and generates a magnetic field in the direction of arrow A (x direction). The magnetic bias magnet 11A is formed by alternately laminating multiple layers of magnetic layers 12 made of CoPt alloy and non-magnetic layers 13 made of Cr, and has a long side (y direction), a short side (x direction) and a magnetic bias film 11A. The thickness (z direction) of the lamination direction becomes shorter in order, and the approximate rectangular parallelepiped shape.
[0090] In this embodiment, the length of each side is 700 μm for the long side (y direction) and 140 μm for the short side (x direction), and the intervals between the bias magnets 11A and 11B, 11B and 11C are 10 μm, respectively. Furthermore, in thickness (z direction), t...
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