Article storing device

A storage device and article technology, which is applied to storage devices, transportation and packaging, etc., can solve the problems of increasing the time spent in transporting substrates, and the inability to configure manufacturing processes nearby.

Inactive Publication Date: 2008-01-16
MURATA MASCH LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In Patent Document 1, although an automatic warehouse is provided close to each manufacturing process, due to the improvement of productivity, etc., it is necessary to enhance the storage capacity of the automatic warehouse. Due to the spatial relationship, the manufacturing process and automatic warehouse cannot be arranged nearby
Moreover, if the manufacturing process is configured separately from the automatic warehouse, it will increase the time it takes for an unmanned guided vehicle to transport substrates between the manufacturing process and the automatic warehouse

Method used

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Embodiment Construction

[0033] Next, preferred embodiments of the present invention will be described.

[0034] Fig. 1 is a schematic configuration diagram of a portion excluding the inside of the ceiling of a conveyance system according to an embodiment of the present invention. FIG. 2 is a partial perspective view of a lifting device 2 in FIG. 1 and the corresponding lifting device 2 in the ceiling. Fig. 3 is a top view of the inner part of the ceiling in Fig. 2 . The transport system 10 is set in the clean room of the semiconductor manufacturing factory, as shown in Figures 1 to 3, it has four inter-fields 7, four storages 20, transport tracks 10, OHT (Overhead Hoist Transport) transport trolleys 17 And a storage device (item storage device) 101.

[0035] Four spacers 7 are arranged in double rows in the vertical direction of FIG. 1 and in the left-right direction of FIG. 1 . Four semiconductor manufacturing apparatuses 14 are provided in each inter-field 7, and each process of semiconductor ma...

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Abstract

The present invention provides a goods storage device which enhances goods storage capability and reduces conveying time. Arranging four storage frame (23) parallel to each other in a storage space (1), and setting orbit (25) between adjacent storage frames (23). A conveying automatic device (24) conveys conveying devices (18) between the storage frame (23) and a storage bateau (32), at the same time, moves along the orbit (25) and conveys the conveying devices (18) between the storage frames (23) and the storage bateau (32). A lifting platform (6) conveys the conveying devices (18) between the storage bateau (32) and a moving in-out bateau (26), at the same time, moves in vertical direction passing through ceiling (5). An OHT conveying vehicle (17) conveys the conveying devices (18) between the moving in-out bateau (26) and a semiconductor manufacture device, at the same time, moves along the orbit (13) in the working procedure.

Description

technical field [0001] The invention relates to an item storage device which uses a transport trolley suspended on the ceiling to transport stored items. Background technique [0002] It is recorded in Japanese Patent Document 1 that in the manufacturing factory of liquid crystal display devices, an automatic warehouse (item storage device) for storing substrates and the like used in the manufacturing process is installed corresponding to each manufacturing process, and the substrates produced in each manufacturing process are stored (items) are transported to the corresponding automatic warehouse by unmanned transport vehicles (transportation trolleys), and transported to the automatic warehouses corresponding to other manufacturing processes by the ceiling transport vehicles installed between the automatic warehouses in the automatic warehouse. In the warehouse, the substrates are transported from the automated warehouse to other manufacturing processes. [0003] Patent D...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G1/04
Inventor 津下公博
Owner MURATA MASCH LTD
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