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Appraising device and method using the same

An evaluation device and evaluation method technology, applied in optics, instruments, electrical components, etc., can solve problems such as difficulties in tracking high-speed animations

Inactive Publication Date: 2008-06-25
MITSUBISHI ELECTRIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, LCD has the so-called viewing angle and contrast limitations, and it is difficult to track the high-speed response corresponding to animation.

Method used

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  • Appraising device and method using the same
  • Appraising device and method using the same
  • Appraising device and method using the same

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Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0032] Next, the evaluation device according to Embodiment 1 will be described with reference to the drawings. FIG. 1 is a configuration diagram showing the evaluation device according to the first embodiment, and FIG. 2 is an equivalent circuit diagram showing the configuration of the evaluation device according to the first embodiment. In addition, FIG. 3 is an equivalent circuit diagram showing an evaluation unit constituting the evaluation device according to the first embodiment.

[0033] First, the evaluation device will be described using FIG. 1 . The evaluation device according to Embodiment 1 includes an evaluation unit arrangement area 108 formed on an insulating substrate 1 in which an evaluation unit as an element is arranged, and a signal voltage applied to each evaluation unit in the evaluation unit arrangement area 108 is output. A signal wiring decoder 110, a signal output buffer 109 that reads a current output from each evaluation unit, and a scan wiring deco...

Embodiment approach 2

[0068] Next, an evaluation device according to Embodiment 2 will be described. The evaluation device according to the second embodiment also has the same configuration as that shown in FIG. 1 in the first embodiment. In Embodiment 1, as an evaluation unit, a thin film transistor made of a polycrystalline semiconductor film is used as a constituent element. On the other hand, the second embodiment is characterized in that a thin film transistor is used as a switching element, and a capacitive element electrically connected in series therewith also serves as a constituent element of the evaluation unit. In addition, in the evaluation device of the second embodiment, by appropriately using a semiconductor film polycrystallized by irradiating a laser beam to an amorphous semiconductor film formed on an insulating substrate as a thin film transistor, it is possible to evaluate a polycrystalline semiconductor film. The crystal grain size and its deviation, etc.

[0069] FIG. 8 is ...

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Abstract

The invention relates to a display device, comprising a film transistor using a poly-silicon film which crystallizes the amorphous silicon film through laser, wherein, the error on the particle diameter of poly-silicon film inside a substrate plane has to be reduced in order to ensure the display quality. However, in the method of optically managing the unevenness on the surface of the poly-silicon film, only errors in extremely small grade can be mastered. According to the evaluation device of the invention, as an insulated substrate (1) comprises a plurality of evaluation units (101), a signal wiring (105) for stressing a voltage on the evaluation units (101), and a signal-taken output terminal pad (104) for measuring the signal outputted by the evaluation units (101) through a signal-taken wiring (106), the invention can measure the distribution of the electric property inside the plane easily. Besides, the invention can manage the error of crystal particles of the poly-silicon film inside plane by evaluating the electric properties related to the crystal particles of the poly-silicon film.

Description

technical field [0001] The present invention relates to an evaluation device for evaluating film quality of a polycrystalline semiconductor film obtained by irradiating an amorphous semiconductor film with laser light, and an evaluation method using the evaluation device. Background technique [0002] Currently, a liquid crystal display device (LCD), which is one of conventional thin panels, has features such as low power consumption and light weight. Taking advantage of these characteristics, LCDs are widely used in monitors of personal computers, monitors of portable information terminal equipment, and the like. In addition, in recent years, it has been widely used as a TV application instead of the conventional cathode ray tube. However, LCDs have a so-called viewing angle and contrast limitations, making it difficult to track high-speed responses corresponding to movies. EL display devices are gradually being used as devices for next-generation thin panels that elimina...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/12H01L23/544H01L21/66G01R31/26
CPCG02F2001/136254H01L27/1214H01L27/1285H01L27/13G02F2202/104H01L27/1255H01L27/12G02F1/136254G02F1/13
Inventor 竹口彻本并薰
Owner MITSUBISHI ELECTRIC CORP