Silicon carbide boat cleaning method

Abstract

The invention discloses a carborundum boat washing method which includes the steps of cleaning the surface, soaking with aqua fortis, soaking with hydrofluoric acid, heat treatment, surface treatment, flame polish, etc. Through the step of soaking with aqua fortis, metal impurities such as iron, manganese, cuprum, natrium, kalium and the like left on the carborundum boat can be got rid of. The annealing treatment of putting the carborundum boat in an annealing furnace can accelerate the precipitation of the impurities in the carborundum boat, eliminate stress and improve thermal stability of the carborundum boat. The carborundum boat washed through the method is of nearly the same cleanliness, colour and luster and use effect with a new carborundum boat. The carborundum boat washing method is good in washing effect and the cost is only 1 / 10-1 / 30 of the cost of a new carborundum boat, thus greatly reducing production cost of the corporation.

Description

Cleaning method of silicon carbide boat technical field The invention relates to a method for cleaning a silicon carbide boat. Background technique Silicon carbide boat is the carrier of large-scale integrated circuits in the process of ultra-high temperature processing, and plays an important role in the production process of semiconductor wafers. The silicon carbide boat has the characteristics of no deformation and durability under high temperature, but it needs to be cleaned after a period of use, otherwise the silicon carbide boat will be unusable. Since silicon carbide boats are mostly made of silicon carbide, this material is hard and brittle and difficult to process, so the price is very high. At present, the cleaning of silicon carbide boats is only simple soaking with hydrofluoric acid. The cleaning effect is not ideal and cannot meet the needs of use. There are still a large number of silicon carbide boats that cannot be used because they cannot be cleaned or t...

AI Technical Summary

Problems solved by technology

The technical problem to be solved by the present invention is to provide a cleaning method for silicon carbide boats with ideal cleaning effect and low cost.