Transfer chamber with rolling diaphragm

Abstract

The present invention provides a device used for transferring large-area substrate in vacuum. The device comprises the following components: a vacuum chamber body with a plurality of side walls and a base; a lifting mechanism; a manipulator which is basically arranged in the inner space of the chamber body and is connected to the lifting mechanism that selectively controls the height of the manipulator in the inner space; and one or a plurality of rolling diaphragms between the manipulator and the base of the chamber body. The present invention also provides a method for transferring large-area substrate. The using of one or a plurality of rolling diaphragms provides a clean vacuum environment and eliminates the requirement for the valuable corrugated pipe and accurate mechanically machined element. Furthermore the invention also eliminates the requirement of accurate alignment required in the using of lip-shaped sealing. Therefore the device according to the invention has the advantages of cost saving, easy assembling and easy maintenance.

Description

technical field [0001] The present invention generally relates to vacuum transfer chambers with rolling diaphragms. Background technique [0002] Two rapidly developing technology areas are thin film transistors and optoelectronic devices. Thin film transistors (TFTs) formed by flat panel technology are commonly used in active matrix displays such as computer and television monitors, cell phone displays, personal digital assistants (PDAs) and a growing number of other devices. Generally, a panel comprises two glass plates with a layer of liquid crystal material sandwiched between them. At least one of the glass sheets includes a conductive film disposed thereon connected to a power source. Power applied to the conductive film by a power source changes the orientation of the crystalline material, producing a graphic display. [0003] Photovoltaics (PV) or solar cells are devices that convert sunlight into direct current (DC) electricity. PV or solar cells usually have one...

AI Technical Summary

Problems solved by technology

Preparing such precise components is very expensive

Also, lip seals in long-stroke applications are prone to particle generation due to increased seal wear, which can also shorten seal life

[0008] Bellows are also expensive to manufacture, especially in terms of the large diameters required for use in large area substrate handling equipment

Additionally, bellows suitable for use as pressure barriers are generally not designed to accommodate the extended range of motion, which can cause the bellows to fail

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