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Ranged fault signatures for fault diagnosis

A technique for error and misclassification, applied in the field of error diagnosis, which can solve problems such as problems

Inactive Publication Date: 2009-05-20
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This can be problematic when classifying errors with complex correlations with multiprocessing variables

Method used

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  • Ranged fault signatures for fault diagnosis
  • Ranged fault signatures for fault diagnosis
  • Ranged fault signatures for fault diagnosis

Examples

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Embodiment Construction

[0019] This document describes a method and apparatus for diagnosing errors. In a specific embodiment, one or more processing variables that contribute to the error are identified. If a process variable has a measured value outside the control limits, it may contribute to the error. The corresponding contribution of one or more treatment variables is determined. The respective contributions are normalized and arranged in a ranked list, where the ranking is based on the amount of error contribution. It is determined that an error characteristic of the detected error is met. In one embodiment, an error signature matches the detected error if the corresponding contributions of the identified process variables are within the corresponding contributions of the matching error signature. Each of these error signatures is associated with at least one error classification for identifying a particular error cause.

[0020] In the following description, numerous details are set forth...

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Abstract

A method and apparatus for diagnosing faults. A fault is detected. One or more process variables that contributed to the fault are determined. A relative contribution of each of the one or more process variables is determined. A determination is made as to which fault signatures match the fault, a match occurring when the relative contributions of the one or more process variables are within relative contribution ranges of the matching fault signature. Each fault signature is associated with at least one fault class.

Description

[0001] related application [0002] This application claims priority to provisional application 60 / 746,649, filed May 7, 2006, and provisional application 60 / 746,647, filed May 7, 2006. technical field [0003] Particular embodiments of the present invention relate to fault diagnosis, and more particularly to fault diagnosis using ranged fault signatures. Background technique [0004] Many businesses employ sophisticated manufacturing equipment that includes multiple sensors and controls that are carefully monitored during processing to ensure product quality. One approach to monitoring these multiple sensors and controllers is statistical process monitoring (a means of statistical analysis of sensor measurements and process control values ​​(process variables)), which enables automatic detection and / or error diagnosis. A "fault" may be a malfunction or misalignment of manufacturing equipment (such as a deviation of a machine's operating parameters from desired values), or ...

Claims

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Application Information

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IPC IPC(8): G06F11/00
Inventor L·J·小哈维A·T·施沃姆
Owner APPLIED MATERIALS INC