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Mini-prober for tft-lcd testing

A probe-and-equivalent technology used in the field of integrated test systems to address operational, transfer, and storage difficulties

Active Publication Date: 2009-06-10
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Typically, the size of the probe assembly is equal to or larger than the area of ​​the substrate size, and this large area of ​​the probe assembly creates difficulties in handling, delivery, and storage

Method used

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  • Mini-prober for tft-lcd testing
  • Mini-prober for tft-lcd testing
  • Mini-prober for tft-lcd testing

Examples

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Embodiment Construction

[0022] The term "substrate" as used herein generally refers to a large area substrate made of glass, polymeric material, or other substrate material suitable for forming electronic devices thereon. Various embodiments described herein relate to testing electronic devices such as TFTs and pixels on flat panel displays. Other electronic devices that may be located on large area substrates and tested include photovoltaic cells for solar cell arrays, organic light emitting diodes (OLEDs), and other devices, among others. The test procedure is exemplarily described using an electron beam or charged particle emitter in a vacuum, but certain embodiments described herein may equivalently employ optics, charge sensors, or be configured to operate under vacuum conditions or at atmospheric pressure or Other test applications for testing electronic devices on large area substrates at near atmospheric pressure.

[0023] Embodiments described in this application will refer to various drive...

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PUM

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Abstract

An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.

Description

technical field [0001] Embodiments of the present invention generally relate to testing systems for substrates. More specifically, the present invention relates to an integrated test system for large area substrates in the manufacture of flat panel displays. Background technique [0002] Flat panel displays, sometimes called active matrix liquid crystal displays (LCDs), have recently become more common as a replacement for the cathode ray tubes (CRTs) of yesteryear. LCDs offer several advantages over CRTs, including high image quality, light weight, low voltage requirements, and low power consumption. Such displays have a variety of applications in computer monitors, mobile phones and televisions. [0003] One type of active matrix LCD includes a liquid crystal material sandwiched between a thin film transistor (TFT) array substrate and a color filter substrate to form a flat panel substrate. Generally, the TFT substrate includes an array of thin film transistors, each of...

Claims

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Application Information

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IPC IPC(8): G01R1/067
CPCG09G3/006
Inventor B·M·约翰斯通S·克里希纳斯瓦米H·T·恩古耶M·布鲁纳刘永
Owner APPLIED MATERIALS INC