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Gas sensor chip and gas sensor provided therewith

A gas sensor and chip technology, applied in the direction of material thermal conductivity, material resistance, etc., can solve problems such as short maintenance of sensors, achieve stable output characteristics, improve durability, and reduce the frequency of maintenance.

Inactive Publication Date: 2009-08-12
YAMATAKE HONEYWELL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

The shorter the life of the sensor, the more frequent the maintenance (or sensor replacement) will be, resulting in the problem of operation guarantee or operating cost

Method used

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  • Gas sensor chip and gas sensor provided therewith
  • Gas sensor chip and gas sensor provided therewith
  • Gas sensor chip and gas sensor provided therewith

Examples

Experimental program
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Embodiment Construction

[0074] Hereinafter, the gas sensor chip 100 according to one embodiment of the present invention and the gas sensor 10 including the gas sensor chip will be described in detail with reference to the drawings. First, the gas sensor chip 100 according to one embodiment of the present invention will be described. figure 1 It is a cross-sectional view showing the gas sensor chip 100 according to one embodiment of the present invention along a direction perpendicular to the surface on which the temperature measuring resistance of the substrate 110 is formed.

[0075] Such as figure 1 As shown, the gas sensor chip 100 has: a substrate 110, a temperature-measuring resistor 120 patterned on one side of the substrate 110; a recess 130 formed on the opposite side of the substrate 110 to the temperature-measuring resistor 120; The silicon porous layer 140 on the inner surface; the oxidation combustion catalyst 150 carried by the silicon porous layer 140 ; ​​and the glass base 160 connec...

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Abstract

To provide a gas sensor chip, and a gas sensor provided therewith, capable of producing stable output characteristics over an extended period of time even when installed in a harsh environment such as a boiler smokestack carrying exhaust gasses. There is a backside structure wherein a catalyst carrier that contacts a gas to be measured is disposed on one side of a thermal conductor (113), a temperature sensing portion (120) is disposed in a location that does not contact the gas to be measured, on the other side of the thermal conductor, and the temperature sensing portion measures the temperature corresponding to the temperature of the catalyst carrier through the thermal conductor, to enable the sensing of the amount of flow over an extended period of time without the temperature sensing portion being negatively affected by the gas to be measured.

Description

technical field [0001] The present invention relates to a small and durable contact combustion type gas sensor chip and a gas sensor including the chip. Background technique [0002] Conventionally, there is known a contact combustion type gas sensor which has high sensitivity only to unburned gas such as carbon monoxide and detects the component amount of carbon monoxide which is unburned gas in exhaust gas (for example, refer to Patent Document 1). [0003] In the contact combustion gas sensor described in Patent Document 1, a gas detection element and a compensation element forming a bridge circuit are held on metal pins penetrating and fixed to a base of an insulator, and these elements are covered with a cap. The gas detection element is composed of a temperature measuring resistance and an oxidation combustion catalyst layer covering the temperature measurement resistance. The oxidation combustion catalyst layer is composed of α-iron oxide fine powder loaded with a gol...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/14
CPCG01N27/18G01N25/18
Inventor 德田智久松永晋辅中崎善之堀田耕一郎
Owner YAMATAKE HONEYWELL CO LTD
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