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inertial force sensor

An inertial force and sensor technology, applied in instruments, steering sensing equipment, device material selection, etc., can solve problems such as the inability to achieve miniaturization of electronic equipment

Inactive Publication Date: 2011-11-30
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] However, in the above configuration, when detecting the angular velocities of a plurality of detection axes, it is necessary to ensure a mounting area for mounting a plurality of detection elements and a plurality of angular velocity sensors on the mounting substrate corresponding to each detection axis, and it is impossible to realize each miniaturization of electronic equipment

Method used

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Embodiment approach

[0039] figure 1 It is a perspective view of a detection element of an angular velocity sensor which is a type of inertial force sensor according to an embodiment of the present invention. figure 2 It is a working state diagram of the detection element of the angular velocity sensor which is a kind of inertial force sensor according to the embodiment of the present invention.

[0040] figure 1 Among them, an angular velocity sensor according to an embodiment of the present invention includes a detection element 1 for detecting an angular velocity. This detection element 1 has two orthogonal arms formed by connecting the first arm 2 and the second arm 4 in substantially orthogonal directions; a support portion 6 ; and a fixing arm 8 . The support portion 6 supports the two first arms 2 . The fixed arm 8 is an orthogonal arm formed by connecting the third arm 10 to the first arm 2 in a substantially orthogonal direction. The first arm 2 and the support portion 6 are arranged...

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Abstract

The invention provides an inertial force sensor, which is provided with a detection element (1), and the detection element (1) has two arms formed by connecting a first arm (2) to a second arm (4) in an orthogonal direction. Orthogonal arms; supporting parts (6) supporting two first arms (2); (4) is provided with the opposite part (16) that is bent to the second arm (4) itself, and the hammer part (11) is connected to the front end of the second arm (4), and the hammer part (11) is provided with There is a recess (12) and the front end portion of the second arm (4) is connected to the recess (12).

Description

technical field [0001] The invention relates to an angular velocity sensor for detecting angular velocity used in attitude control or navigation of moving objects such as airplanes, automobiles, robots, ships, and vehicles. Background technique [0002] Hereinafter, a conventional angular velocity sensor will be described. Conventional angular velocity sensors detect angular velocity by vibrating a detection element of various shapes such as a tuning fork shape, an H shape, or a T shape, and electrically detecting the deformation of the detection element caused by the generation of Coriolis force. [0003] For example, among the X-axis, Y-axis, and Z-axis that are substantially orthogonal to each other, when the vehicle is arranged on the XY plane of the X-axis and the Y-axis, the angular velocity sensor for the navigation device needs to detect the movement of the vehicle around the X-axis and around the Z-axis. angular velocity. [0004] Conventionally, when detecting an...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/56G01P9/04H01L41/08H01L41/18G01C19/5607G01C19/5621G01C19/5628H10N30/00H10N30/85
CPCH01L41/08G01C19/574G01C19/5712G01C19/5747
Inventor 大内智相泽宏幸
Owner PANASONIC CORP