Check apparatus
A technology for inspection devices and probes, applied in measurement devices, optics, instruments, etc., can solve the problems of time-consuming, difficult to determine the cause of failure, and complicated operations.
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[0017] Hereinafter, an inspection device according to an embodiment of the present invention will be described with reference to the drawings.
[0018] The inspection device of the present embodiment is a device in which an inspection target plate is placed on a table (not shown) that can adjust the XYZ axial direction and the θ rotation direction by an XYZθ table (not shown), The needle probe unit performs a lighting check.
[0019] like figure 1 and figure 2 As shown, the probe unit 1 is installed along the two sides of the liquid crystal panel 2 as the inspection object plate placed on the table. Specifically, the probe unit 1 includes a long side probe unit 3 along the long side of the liquid crystal panel 2 and a short side probe unit 4 along the short side of the liquid crystal panel 2 .
[0020] The long-side probe unit 3 mainly includes a long-side probe base 5 , a probe assembly 6 , and an alignment camera 7 .
[0021] The long-side probe base 5 is for supporting...
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