Wafer test system for integrating radio frequency identification and test method thereof

Abstract

The invention relates to a wafer test system for integrating radio frequency identification (RFID) and a test method thereof. The system comprises a wafer under-test area, a probe machine table, a test machine table, a carrier, a probe machine table, an RFID medium platform, a data analysis system and a technology information system, wherein a wafer carrier is put in the wafer under-test area; theprobe machine table comprises a movement platform, a probe card clamping device and a probe card, the movement platform provides the movements of an X-shaft, a Y-shaft, and a Z-shaft so as to carry awafer to be tested, and the probe card is clamped in the probe card clamping device; the test machine table inputs a test signal to the probe machine table to test the wafer and calls an interface program after the test to change a test result into a file in a specific data format; an RFID label is arranged on the carrier; an RFID reader is arranged on the probe machine table; the RFID medium platform calls a related application program by reading the information of the label to generate corresponding information of the wafer; the data analysis system receives the file in the specific data format and calculates and processes yield information after the wafer is tested; and the technology information system is used for integrating the information of the wafer and the yield of the RFID medium platform so as to monitor the technology mainly using the wafer and the yield in a real-time mode.

Description

technical field [0001] The present invention relates to a wafer testing system and its testing method, in particular to a wafer testing system integrating radio frequency identification (RFID) technology and its testing method. Background technique [0002] The prior art about the use of RFID technology in wafer inventory or delivery has been disclosed in US Pat. Among them, U.S. Patent US6330971 discloses a system that uses RFID technology to track chips, such as Figure 1A As shown, the system 10 includes a plurality of carriers 11 carrying wafers, an RFID reader 12, an RFID tag 14 attached to the carrier 11, and a controller 13, wherein the RFID reader 12 passes through a plurality of antennas thereon 15 to read the RFID tags 14 attached to each carrier 11, and at the same time, the RFID reader 12 transmits the read tag information to the controller 13 through the RS232 interface to provide the current location of the carrier 11 and its wafers. Location. [0003] In add...

AI Technical Summary

Problems solved by technology

[0005] The content of the above-mentioned prior art mainly utilizes RFID for wafer delivery or tracking, but does not effectively integrate the RFID technology with the data analysis information system related to wafer testing, so as to provide the system or operator (operator), manufacturing system, or even Real-time monitoring of wafer-based processes and yields by contracted manufacturing customers

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