Membrane integrated microtrip ferrite circulator
A ferrite and circulator technology, applied in waveguide-type devices, electrical components, circuits, etc., can solve problems such as unfavorable microwave circuit integration, small effective permeability tensor k/μ, etc., to reduce volume, promote Evolving, easy-to-integrate effects
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Embodiment 1
[0012] Example 1: figure 2 .It is a schematic diagram of the unfolded state of each part of the circulator in this embodiment, and the substrate 1 is made of Al 2 o 3 Ceramic material, its thickness is 200μm (micron), relative permittivity is 9.8; its bottom groove 6 radius R880μm, groove depth 150μm,; ferrite diaphragm 2 is barium ferrite, thickness is 10μm, saturation magnetization It is 2500Gs, the relative permittivity is 15, and the bias magnetic field received by the ferrite film is 10 6 A / m; the central junction 3, the matching section 4, and the grounding film 5 are all gold (Au) films with a thickness of 3 μm. The widths and lengths of the two-node wires with narrow outer ends are 400 μm, 200 μm, 160 μm, and 940 μm, respectively; the high-conductivity metal block 7 is made of silver (Ag), and its radius is the same as that of the central junction 3, which is also 880 μm , and its thickness is 150 microns.
[0013] The manufacturing method of the circulator in thi...
Embodiment 2
[0015] Example 2: Figure 4 .It is a schematic diagram of the structure of the present embodiment 2. The substrate 1 and its groove 6, the ferrite diaphragm 2, the central junction 3, and the matching section 4 are all the same as those of the embodiment 1. In this embodiment, the bottom surface of the substrate 1 and the concave A gold film with a thickness of 3 μm is evaporated on the inner surface of the groove 6, and the metal block (Ag) 7 is omitted to save some precious metals and further reduce the weight.
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