Method for modeling variable section beam in micro-electronic-mechanical system (MEMS) level design

A variable cross-section beam and variable cross-section technology, applied in chemical instruments and methods, calculations, instruments, etc., can solve the problems that MEMS devices cannot be used for system-level simulation design

Inactive Publication Date: 2011-11-16
南通升辉建材科技有限公司 +1
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the above-mentioned technical problems, the present invention proposes a system-level modeling method for variable-section beams whose width varies linearly with the length direction, which solves the current problem that system-level simulation design cannot be performed on MEMS devices with such structures

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for modeling variable section beam in micro-electronic-mechanical system (MEMS) level design
  • Method for modeling variable section beam in micro-electronic-mechanical system (MEMS) level design
  • Method for modeling variable section beam in micro-electronic-mechanical system (MEMS) level design

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0089] In the following, the present invention will be further described in combination with system-level component modeling of an actual variable-section beam structure. Known beam length l=200um, w1=30um, w2=5um, t=5um, E=130GP a , ρ=2330kg / m 3 , υ=0.22, B '=0; Initial azimuth α=0, β=0, γ=0; The concrete steps of the example of the present invention are as follows:

[0090] Step 1: Take the length direction of the variable cross-section beam as the x-axis, the width direction as the y-axis, and the thickness direction as the z-axis to establish a local coordinate system.

[0091] Step 2: Deduce the bending stiffness matrix [k of variable-section beams in the xoy plane yij ](i=1, 2, j=1, 2) and the bending stiffness matrix in the xoz plane [k zij ] (i=1, 2, j=1, 2).

[0092] The mechanical model of the cantilever beam is established by constraining the end face 2, and in the xoy plane, the formula (1)-(13) can be used to obtain

[0093] k ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a method for modeling a variable section beam in micro-electronic-mechanical system (MEMS) level design, which belongs to the field of design of MEMSs. The method comprises the following main processes: firstly, establishing a local coordinate system of a variable section beam; then respectively deducting a rigidity matrix, a damping matrix and a quality matrix of the variable section beam in the local coordinate system according to a structural mechanics and structural matrix analyzing theory and establishing a second order kinetic equation of the variable section beam by the matrixes; and finally coding the second order kinetic equation by a hardware description language and realizing the modeling of a parameterized system level assembly of the variable section beam. The method for modeling the variable section beam of which the width is linearly changed along with the length direction in the system level solves the problem that the system level simulation design can not be performed on the current MEMS device in the structure.

Description

technical field [0001] The invention relates to a variable-section beam modeling method in micro-electro-mechanical system (MEMS) system-level design, and belongs to the field of micro-electro-mechanical system design. Background technique [0002] In the MEMS structure, in order to achieve some design goals of the beam, such as small stress concentration, small size, high strength, light weight, good stability, etc., and considering the change of the bending moment of the beam along the axis, the width is often used Variable-section beams that vary linearly with length replace conventional constant-section beams to optimize the structure. For example, in inertial devices such as micro-accelerometers and micro-mechanical gyroscopes, the bending moment borne by most cantilever beams changes along its axial direction, so it is necessary to ensure that the free end of the cantilever beam structure has a small stiffness to generate a large bending moment. The deformation of the...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Patents(China)
IPC IPC(8): G06F17/50B81C5/00
Inventor 苑伟政郝星常洪龙
Owner 南通升辉建材科技有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap