Method for modeling variable section beam in micro-electronic-mechanical system (MEMS) level design

A variable cross-section beam and variable cross-section technology, applied in chemical instruments and methods, calculations, instruments, etc., can solve the problems that MEMS devices cannot be used for system-level simulation design
CN101673314BInactive Publication Date: 2011-11-16南通升辉建材科技有限公司 +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
南通升辉建材科技有限公司
Publication Date
2011-11-16
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a method for modeling a variable section beam in micro-electronic-mechanical system (MEMS) level design, which belongs to the field of design of MEMSs. The method comprises the following main processes: firstly, establishing a local coordinate system of a variable section beam; then respectively deducting a rigidity matrix, a damping matrix and a quality matrix of the variable section beam in the local coordinate system according to a structural mechanics and structural matrix analyzing theory and establishing a second order kinetic equation of the variable section beam by the matrixes; and finally coding the second order kinetic equation by a hardware description language and realizing the modeling of a parameterized system level assembly of the variable section beam. The method for modeling the variable section beam of which the width is linearly changed along with the length direction in the system level solves the problem that the system level simulation design can not be performed on the current MEMS device in the structure.
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Description

technical field

[0001] The invention relates to a variable-section beam modeling method in micro-electro-mechanical system (MEMS) system-level design, and belongs to the field of micro-electro-mechanical system design. Background technique

[0002] In the MEMS structure, in order to achieve some design goals of the beam, such as small stress concentration, small size, high strength, light weight, good stability, etc., and considering the change of the bending moment of the beam along the axis, the width is often used Variable-section beams that vary linearly with length replace conventional constant-section beams to optimize the structure. For example, in inertial devices such as micro-accelerometers and micro-mechanical gyroscopes, the bending moment borne by most cantilever beams changes along its axial direction, so it is necessary to ensure that the free end of the cantilever beam structure has a small stiffness to generate a large bending moment. The deformation of the...

Claims

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