Vacuum heating degassing treatment equipment
A processing equipment and vacuum heating technology, which is applied in the manufacture of electrical components, electric solid-state devices, semiconductor/solid-state devices, etc. The effect of improving the service life and the simple structure of the equipment
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0016] like figure 1 , figure 2 As shown, the vacuum heating and degassing treatment equipment 100 of the present invention includes a frame 1, a vacuum chamber 2, a heating plate 3, a cooling plate 4, a sealing isolation valve 5, a lifting assembly 6, a horizontal conveying assembly 7, and a vacuum pumping system 8 and control system (not shown in the figure). The vacuum chamber 2 is fixed on the frame 1, the two sides of the vacuum chamber 2 are respectively provided with an inlet 21 and an outlet 22, and the lifting assembly 6 is installed under the vacuum chamber 2, the Lifting assembly 6 has several support columns 63, and described support column 63 stretches into described vacuum chamber 2 in a sealed manner and can freely lift straight up and down in described vacuum chamber 2 and forms a support surface at free end, and described heating 3 boards are installed inside the vacuum chamber 2 and above the support surface formed by the free ends of the support columns 6...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 