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One-dimensional scanning measurement head mechanism with constant measurement force

A technology of scanning probe and measuring force, applied in the field of measuring instruments, can solve the problems of inaccurate displacement indication, unsafe measurement process, error in measurement results, etc., and achieve the effect of accurate measurement indication

Inactive Publication Date: 2012-05-30
XIAN TECH UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] The present invention provides a one-dimensional scanning probe mechanism with a constant measuring force to overcome the inaccurate displacement display value of the existing probe mechanism, the large error of the measurement result, the sensitivity to external vibration and interference, and the inaccurate measurement process. safety issue

Method used

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  • One-dimensional scanning measurement head mechanism with constant measurement force
  • One-dimensional scanning measurement head mechanism with constant measurement force
  • One-dimensional scanning measurement head mechanism with constant measurement force

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Embodiment Construction

[0029] The present invention will be described in detail below with reference to the accompanying drawings.

[0030] see figure 1 , a common scanning probe mechanism in the prior art, including a moving plate 3, a fixed plate 8 and a sensor 11, the moving plate 3 is provided with a probe 1, a probe seat 2 and a moving rod 13, and the A pair of supporting reeds 4 are vertically arranged between the two ends of 8, and a reinforcing plate 5 oppositely arranged is fixed on the supporting reeds 4.

[0031] see figure 2 , a one-dimensional scanning probe mechanism with constant measuring force, including a moving plate 3 and a fixed plate 8, a pair of supporting reeds 4 are vertically arranged between the two ends of the moving plate 3 and the fixed plate 8, and the supporting reeds 4 is fixed with a pair of opposite reinforcing plates 5 , and the moving plate 3 is provided with a stylus 1 , a probe base 2 , a moving rod 13 and a sensor 11 . The top of said fixed plate 8 is prov...

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Abstract

The invention relates to a one-dimensional scanning measurement head mechanism with constant measurement force. The mechanism comprises a movable plate and a fixed plate; the upper part of the fixed plate is provided with a limiting seat; the middle part of the limiting seat is provided with a limiting swing rod; the lower end of a movable rod is arranged opposite to the upper end of the limitingswing rod; a pair of reset reeds and a pair of sensor brackets symmetrical to the movable rod are arranged on the limiting seat, the upper ends of the reset reeds are pressed on two sides of the lower end of the movable rod, one of the pair of sensor brackets is provided with a fixing part for a sensor, and the movable part of the sensor is arranged on the movable rod; an armature is arranged on the movable rod positioned between the upper end of the reset reed and the sensor, and the pair of sensor brackets corresponding to the armature is provided with a permanent magnet respectively; and the inner sides of the upper ends of the pair of sensor brackets are oppositely provided with limiting blocks. By designing a negative rigidity elastic supporting mechanism, the continuously increased reacting force, increased together with displacement, of the parallel reed and the pre-pressing reed is balanced by using magnetic force so as to realize basically constant measurement force.

Description

technical field [0001] The invention relates to the technical field of measuring instruments, in particular to a one-dimensional scanning probe mechanism with constant measuring force. Background technique [0002] Probe is one of the key components of precision measuring instruments. It serves as a sensor to provide geometric information of the workpiece to be measured. Its development level has a great relationship with the measurement accuracy, working performance and efficiency of precision measuring instruments. The inductance micrometer is the earliest precision probe, which was produced in the 1920s. By the end of the 1950s, with the emergence of three-coordinate measuring machines, precision probes had developed rapidly. At present, precision probes can be divided into two categories: contact probes and non-contact probes, and contact probes can be subdivided into three types: mechanical probes, trigger probes and scanning probes. [0003] Mechanical probes, al...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B7/012
Inventor 祝强王洪喜王建华樊利军王俊岭彭宁卢春霞强怀博
Owner XIAN TECH UNIV
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