One-dimensional scanning measurement head mechanism with constant measurement force
A technology of scanning the probe and measuring force, which is applied in the field of measuring instruments, can solve the problems of inaccurate displacement indication, unsafe measurement process, and error of measurement results, etc., and achieve the effect of accurate measurement indication
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[0029] The present invention will be described in detail below with reference to the accompanying drawings.
[0030] see figure 1 , a common scanning probe mechanism in the prior art, including a moving plate 3, a fixed plate 8 and a sensor 11, the moving plate 3 is provided with a probe 1, a probe seat 2 and a moving rod 13, and the A pair of supporting reeds 4 are vertically arranged between the two ends of 8, and a reinforcing plate 5 oppositely arranged is fixed on the supporting reeds 4.
[0031] see figure 2 , a one-dimensional scanning probe mechanism with constant measuring force, including a moving plate 3 and a fixed plate 8, a pair of supporting reeds 4 are vertically arranged between the two ends of the moving plate 3 and the fixed plate 8, and the supporting reeds 4 is fixed with a pair of opposite reinforcing plates 5 , and the moving plate 3 is provided with a stylus 1 , a probe base 2 , a moving rod 13 and a sensor 11 . The top of said fixed plate 8 is prov...
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