Device for clamping reflector at high accuracy

Abstract

The invention relates to a device for clamping a reflector at high accuracy, belonging to the field of optical element clamping devices in ultra-high-accuracy optical element detection equipment. The device solves the problem in clamping the reflector of an ultra-high-accuracy interferometer system. The device mainly comprises a fixed support, an inner ring of a mirror frame, an outer ring of themirror frame, location support structures and compression structures, wherein the inner ring and the outer ring of the mirror frame form the mirror frame; the reflector is fixed in the mirror frame, and keeps direct contact with the inner ring of the mirror frame; the inner ring of the mirror frame is fixed on the outer ring of the mirror frame through the location support structure and the compression structure; the location support structures and the compression structures are respectively distributed uniformly at an angle of 120 degrees; the outer ring of the mirror frame is fixed on the fixed support; and the fixed support is fixed on a bottom plate through location holes in symmetrical arrangement. The device is widely used for clamping optical elements, such as reflectors, lenses and the like, in the ultra-high-accuracy optical element detection equipment, eliminates the influence of the gravity deformation on the accuracy of the device, and solves the problem of over-constraintin the prior art.

Description

technical field [0001] The invention belongs to ultra-high-precision optical element detection equipment, in particular to a clamping device for optical elements such as mirrors or lenses in ultra-precision optical equipment with very high requirements on the surface shape of the optical element. Background technique [0002] Ultra-high-precision interferometers are usually used to detect the surface shape of optical components. To achieve such a high detection accuracy also puts forward high requirements on the accuracy of the interferometer itself. For large-aperture optical components, its gravity deformation becomes particularly important in high-precision applications, and how to compensate the influence of gravity deformation on the surface shape of optical components becomes an important factor to achieve high-precision detection. [0003] Lithography equipment is the core of integrated circuit production equipment in the electronics industry. It uses an objective len...

AI Technical Summary

Problems solved by technology

However, this technology is more suitable for the clamping of lenses. For large-diameter mirrors, it cannot effectively solve the influence of gravity. The support and compression structures in this technology are all to make the gravity deformation more uniform.

Images