Wide spectrum metal dielectric diaphragm grating for femtosecond chirp-pulse amplification system

A metal medium and pulse amplification technology, which is applied in the field of diffraction gratings, can solve problems such as the inability to meet the requirements of femtosecond laser wide spectrum

Inactive Publication Date: 2012-01-11
QINGDAO UNIV
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Problems solved by technology

However, due to interference, its working bandwidth is usually in the range of tens of

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  • Wide spectrum metal dielectric diaphragm grating for femtosecond chirp-pulse amplification system
  • Wide spectrum metal dielectric diaphragm grating for femtosecond chirp-pulse amplification system
  • Wide spectrum metal dielectric diaphragm grating for femtosecond chirp-pulse amplification system

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Embodiment Construction

[0017] The principle, structure and specific implementation of the present invention will be further described below in conjunction with the accompanying drawings.

[0018] figure 1 Schematic diagram of the wide-spectrum metal dielectric film grating structure provided by the present invention, the wide-spectrum metal dielectric film grating sequentially includes a substrate 1, a metal Ag film 2, a dielectric reflection film 7, a remaining film layer 5 and a surface grating structure 6 from bottom to top; The reflective film 7 is made of HfO 2 Dielectric film 3 and SiO 2 The dielectric film 4 is alternately deposited; the metal Ag film 2 and the dielectric reflection film 7 form a high reflection film 8; the refractive index of the remaining film layer is the same as that of the surface grating structure; the period of the grating is 550 nanometers. The etching depth is 240 nm, the thickness of the remaining film layer is 10 nm, the duty ratio is 0.26, and the incident angle...

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Abstract

The invention relates to a wide spectrum metal dielectric diaphragm grating for a femtosecond chirp-pulse amplification system, which comprises a substrate, a metal Ag film, a dielectric reflective film, a residual film layer and a surface grating structure; the dielectric reflective film comprises a HfO2 medium and a SiO2 medium which are deposited alternatively; the metal Ag film and the dielectric reflective film form a high reflective film; and the residual film layer is arranged between the surface grating structure and the dielectric reflective film. When the cycle of the grating is 550nm, the etching depth is 240nm, the thickness of the residual film layer is 10nm, the duty cycle is 0.26 and an incident angle is 53 degrees, to TE (Transverse Electromagnetic) wave with the central wavelength being 800nm, the -1 grade diffraction efficiency of the wide spectrum metal dielectric diaphragm grating for the femtosecond chirp-pulse amplification system from 744 nm to 874 nm is higher than 97 percent, and the effective working band width is up to 130nm. The wide spectrum metal dielectric diaphragm grating has important application value for improving the performance of the chirp-pulse amplification system.

Description

technical field [0001] The invention relates to a wide-spectrum dielectric film grating for a femtosecond chirped pulse amplification system, in particular to a wide-grating high-diffraction-efficiency metal dielectric film grating for an 800-nanometer femtosecond laser pulse amplification system, which belongs to the diffraction grating technology field. Background technique [0002] Ultrashort, ultrafast and high-power lasers have become an important means to explore the interaction of matter under extreme physical conditions. Chirped-pulse amplification technology is an important method to achieve ultrashort and ultrafast laser performance, and pulse width compression gratings are the The core of chirping pulse amplification technology. [0003] In order to improve the working efficiency of the chirped pulse amplification system and meet the requirements of the femtosecond laser spectrum bandwidth, the grating used to stretch and compress the femtosecond laser pulse must...

Claims

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Application Information

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IPC IPC(8): G02B5/18G02B1/10
Inventor 孔伟金王淑华云茂金刘均海滕冰王书浩陈沙鸥
Owner QINGDAO UNIV
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