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Halftone mask with multiple half-transmission parts and manufacture method thereof

A half-tone mask, semi-transmission technology, applied in the photoengraving process of the pattern surface, the original for photomechanical processing, optics, etc., can solve problems such as uneconomical

Inactive Publication Date: 2012-02-22
LG INNOTEK CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, as mentioned above, conventional photomasks can pattern only one layer and thus are not economical

Method used

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  • Halftone mask with multiple half-transmission parts and manufacture method thereof
  • Halftone mask with multiple half-transmission parts and manufacture method thereof
  • Halftone mask with multiple half-transmission parts and manufacture method thereof

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Experimental program
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Effect test

Embodiment Construction

[0037] Hereinafter, a half-tone mask having a plurality of semi-transmissive parts and a method of manufacturing the same according to the present invention will be described in detail with reference to the accompanying drawings.

[0038] refer to figure 2 A half tone mask 100 having a plurality of semi-transmission parts according to an embodiment of the present invention includes a transparent substrate 110 , a light shielding part 125 , a light transmission part 121 and a plurality of semi-transmission parts 130 .

[0039] The transparent substrate 110 is generally made of quartz (Qz), but is not limited thereto. The transparent substrate 110 is generally made of a transparent material capable of transmitting light. The light-shielding portion 125 and the light-transmitting portion 121 are formed by patterning a thin film of a light-shielding material deposited on the transparent substrate 110, more preferably Cr, CrxOy or a mixed material thereof. However, the light-shi...

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PUM

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Abstract

The invention discloses a halftone mask with multiple half-transmission parts and a manufacture method thereof. The halftone mask has at least two or more self-transmission parts with different light transmissions, and can be used for patterning a plurality of layers, the halftone mask with the multiple half-transmission parts comprises a transparent substrate, a light transmission part formed on the transparent substrate for transmitting emitted light with preset wavebands, a light shading part formed on the transparent substrate for shading emitted light with preset wavebands, and at least two or more half-transmission parts formed by depositing half-transmission materials on the transparent substrate for enabling the emitted light with preset wavebands to penetrate through by different light transmissions.

Description

[0001] This application is a divisional application, the filing date of the original application is May 11, 2007, the application number is 200780016462.0 (international application number PCT / KR2007 / 002341), and the name is "Half-tone mask with multiple semi-transparent parts". Mold and its manufacturing method". technical field [0002] The invention relates to a half-tone mask having a transmissive part, a semi-transmissive part and a light-shielding part and a manufacturing method thereof. More specifically, the present invention relates to a half-tone mask having a plurality of half-transmission parts and a method of manufacturing the same, wherein the mask has at least two or more half-transmission parts whose light transmissions are different from each other, using the one The mask can pattern multiple layers. Background technique [0003] Such as figure 1 As shown in , a photomask commonly used during patterning in a photolithography process includes a transparent ...

Claims

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Application Information

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IPC IPC(8): G03F1/32
Inventor 姜甲錫朴宰佑朴相昱沈惟敬李勤植
Owner LG INNOTEK CO LTD