Ultrafast electronic device test system and method thereof
An electronic device, ultra-fast optoelectronic technology, applied in the field of microelectronics measurement, can solve the problem of difficult to find equipment with bandwidth and response time, and achieve the effect of overcoming the lack of time resolution
Inactive Publication Date: 2013-06-26
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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Problems solved by technology
However, the above-mentioned measurement methods of response time need to be realized by equipment much faster than the response of the device. When the response time of the electronic device reaches GHz or above, it is difficult to find suitable equipment for measuring its bandwidth and response time. It is a technical problem that the industry needs to solve urgently
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[0028] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings and a preferred embodiment.
[0029] refer to figure 1 , the ultrafast electronic device response testing system adopts a modular design, which includes a femtosecond pulse laser 100, a femtosecond pulse delay system, an electrical pulse generation module, an electrical pulse detection module, and a data acquisition and correction system 500.
[0030] Among them, the femtosecond pulse laser is used to provide femtosecond optical short pulses;
[0031] The femtosecond pulse delay system is used to provide the time delay change of signal generation and detection of the measurement system, which includes 201-spectroscopic mirror and delay line 202;
[0032] The electric pulse generating module is used to provide a test electric pulse whose generation time can be controlled;
[0033] The electrical pulse detection module can detect electrical sign...
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The invention discloses an ultrafast electronic device test system and a method thereof. The system comprises a femtosecond pulse laser, a femtosecond pulse delayed time system, an electric pulse generation module, an electric pulse detection module and a data collection correction system. According to the method, an optical delayed time system is utilized to divide a light beam into two beams offemtosecond pulse lights with certain time delay. One beam of laser is gathered on a high-speed photodiode and a short electric pulse generated by a photoelectric effect of the photodiode is utilizedto carry out current input or electric field input on a high-speed electronic device; and another beam of the femtosecond pulse light is focused on a minielectro-optic crystal that is connected to anoutput circuit of the ultrafast electronic device as well as a photoelectric detector is utilized to carry out testing on pulse light intensity that is reflected or transmitted from the minielectro-optic crystal; and time delay of the two beams of lights is changed, so that timing sequence measurement is carried out on the ultrafast electronic device. According to the invention, a testing problemof a timing sequence response of an ultrafast electronic device can be effectively solved.
Description
technical field [0001] The invention particularly relates to an ultrafast electronic device testing system and method, which are used for measuring the response time and bandwidth of high-speed electronic devices whose response time is above GHz, and belong to the technical field of microelectronic measurement. Background technique [0002] At present, the common method for testing the response time of electronic devices is to test the bandwidth of electronic devices, that is, by inputting a series of sinusoidal signals of equal amplitude to the electronic device, and then measuring the amplitude of the output sinusoidal signal of the electronic device, when the amplitude of the output signal increases with the input When the frequency is increased and reduced to 0.7 times the low frequency, this frequency is the bandwidth of the electronic device. However, the above-mentioned measurement methods of response time need to be realized by equipment much faster than the response...
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IPC IPC(8): G01R31/00
Inventor 楼柿涛
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI