Unlock instant, AI-driven research and patent intelligence for your innovation.

Method for predicting rotation fault in rotor of vacuum pump, and associated pumping device

A prediction method, technology of vacuum pumps, applied in the direction of measuring devices, pumps, pump components, etc., to achieve the effect of avoiding major failures

Inactive Publication Date: 2012-05-16
ADIXEN VACUUM PRODUCTS
View PDF5 Cites 3 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0013] In addition, forecasts must be reliable

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for predicting rotation fault in rotor of vacuum pump, and associated pumping device
  • Method for predicting rotation fault in rotor of vacuum pump, and associated pumping device
  • Method for predicting rotation fault in rotor of vacuum pump, and associated pumping device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0046]The invention can be used in all types of vacuum pumps comprising a rotor driven in rotation within a stator of a pump body. For example, the vacuum pump may be a pump with rotating vanes, such as a roots pump, with two or three vanes. In a Roots pump, each pump stage consists of two vanes of the same shape, rotating in opposite directions in a stator. As they spin, the gas sucked in is confined in the open space between the rotor and stator, and then exhausted outwards or to the next stage through the exhaust. The rotary vane vacuum pump may also be a two-claw type vacuum pump, also known as a claw pump. In addition, the vacuum pump may also be a molecular pump, a turbo pump or a hybrid pump, or a rotary vane pump or a screw pump.

[0047] figure 1 The apparatus 1 shown in , comprises a treatment chamber 2 connected by a tube 3 to an inlet 4 of a suction device 5 for suction from the chamber 2 in the direction indicated by the arrow 6 . Any processing processes such...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a method for predicting a rotation fault in the rotor of a vacuum pump, including the following steps: recording sequences of events relating to the time variation of functional signals of the vacuum pump (101); searching for a connection between at least one series of events and at least one pattern that is a precursor of a predefined rule of association of a behaviour model of the vacuum pump in the recorded sequences of events, said patterns that are precursors of predefined rules of association implying a rotation fault of the rotor (102); deducing a predictive time window therefrom, during which the vacuum pump will experience a rotor rotation fault (103). The invention also relates to a pumping device, including: a vacuum pump (7) including at least one rotor and a pump body, said rotor being capable of being rotated inside said pump casing by a motor (T) of said pump; a sensor for picking up functional signals (9) of said pump (7); and a means (10) for predicting a predictive time window during which the vacuum pump (7) will experience a rotor rotation fault, said prediction means (10) calculating the predictive time window using measurements supplied by said functional signal sensor (9).

Description

technical field [0001] The present invention relates to the field of predictive and preventive maintenance of vacuum pumps associated with process chambers. More specifically, it relates to tracking sensor signals from vacuum pumps and predicting failures from pump seizing in order to schedule preventive maintenance operations. The invention also relates to a related suction device. Background technique [0002] Vacuum pumps typically include one or more rotors that are driven by a motor for rotation within a pump body (stator) in operation. During rotation, the gas sucked in from the process chamber is confined in the free space between the rotor and the stator to be discharged towards the outlet. [0003] Vacuum pumps are used in particular in methods of manufacturing semiconductors, flat screens or photovoltaic substrates, etc. where pressures below atmospheric pressure are required. However, the gases used in these methods can be converted into solid by-products that ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): F04D19/04F04D27/00F04B37/14F04B51/00F04C25/02G05B19/4065G05B23/02G06F11/00F04C28/28G01H1/00
CPCF04C2220/10F04C2270/07F04B51/00F04C2270/12G01H1/14F04D19/04G05B23/0245G01H1/003F04C2270/80F04D27/001G05B23/0283F05D2260/607F04B37/14F04C25/02F04C28/28F04D19/042G01H1/00G05B19/4065G05B23/02G06F11/00
Inventor N·贝古F·马丁C·帕里赛S·加利谢N·莫格尔
Owner ADIXEN VACUUM PRODUCTS