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Electrical testing apparatus for testing an electrical test sample and electrical testing method

A technology of electric detection and detection head, which is applied in the direction of measuring devices, measuring electricity, measuring electric variables, etc., and can solve problems such as reliability doubts

Inactive Publication Date: 2012-07-18
FEINMETALL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since there is at least one component required for electrical connection between the circuit substrate and the contact head, the relevant parts cannot always be aligned with each other to achieve contact connection, thereby reducing the reliability of this electrical detection device. Being questioned

Method used

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  • Electrical testing apparatus for testing an electrical test sample and electrical testing method
  • Electrical testing apparatus for testing an electrical test sample and electrical testing method
  • Electrical testing apparatus for testing an electrical test sample and electrical testing method

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Embodiment Construction

[0031] figure 1 The detection device 1 is shown, but not all components are shown. The detection device 1 has a contact head 2 (also referred to as a detection head 2), on which there is a conductive rod 4 displaceably placed in the guide hole 3, and the conductive rod 4 is preferably a flexible contact pin. The conductive rod 4 has a free end 5 which can be brought into physical contact with a contact of an electrical sample (not shown). To this end, the detection device 1 is lowered onto the sample, or the sample is raised onto the detection device 1 , or both are brought close together. The other end 6 of the conductive rod 4 is in physical contact with a contact distance converter 7 having a bracket 8 and an electrical contact distance conversion circuit 9 . The bracket 8 is preferably a metal bracket. The contact pitch conversion circuit 9 is fixedly connected to the ceramic support 8 . The support 8 has a recess 10 in which the contact-spacing switching circuit 9 is...

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PUM

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Abstract

An electrical testing apparatus for testing an electrical test sample. The apparatus includes a conductor substrate which is electrically connected via a contact spacing converter to a test head. The conductor substrate is mechanically connected to a first stiffening device and is thereby stiffened. At least one spacer (30) which penetrates the conductor substrate (12) is mechanically connected to the contact spacing converter (7) and is held on the first stiffening device (26) via at least one tilt adjusting arrangement (34).

Description

[0001] This application is a divisional application of the patent application with application number 200910151186.X. technical field [0002] The invention relates to an electrical testing device for testing electrical samples, comprising a circuit substrate electrically connected to a test head via a contact pitch converter, wherein the circuit substrate is mechanically connected to a first strengthening device and thus strengthened. Background technique [0003] Electrical detection devices of the aforementioned type are known and are used to electrically contact an electrical sample, such as a wafer. This includes physical contact by which an electrical circuit connected to a detection device for measuring the electrical properties of the test specimen is completed. In this way, samples with good reliability can be distinguished from samples with poor reliability. The known electrical testing device comprises a circuit substrate which is electrically connected to a te...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R1/073
CPCG01R1/07357G01R1/07378G01R31/2886
Inventor 贡特尔·伯姆贝里斯拉夫·科皮拉斯西尔维娅·埃尔勒米夏埃尔·霍洛谢尔
Owner FEINMETALL