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System for measuring, using a QMS, an absolute quantity of each component of a gas

A quality system and measurement system technology, which is applied in the field of absolute gas measurement systems for different components, can solve problems such as difficult periods and inability to export analysis results, and achieve the effects of improving productivity, high-quality analysis results, and improving industrial competitiveness.

Inactive Publication Date: 2012-08-22
有限公司益爱儿 +1
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Problems solved by technology

[0006] Even if you want to use gas analysis to grasp the cause of the above-mentioned failure, if there is no prior information about the component substances and partial pressure of the gas using the existing gas chromatography (GC: Gas Chromatography) gas analysis equipment and methods, In order to grasp the content of the gas, it is necessary to carry out continuous repeated experiments, and accordingly a long period of experiment and a large amount of gas samples are required
[0007] In addition, when the content of the gas sample is very complicated, sometimes the analysis result cannot be derived
[0008] Therefore, in order to overcome the above-mentioned existing GC analysis problems, the National Institute of Standards and Technology (NIST, National Institute of Standards and Technology) provided 220,000 samples of spectrum (Spectrum) data, and compared the analysis results with the spectrum data ・Contrast so that analysis can be performed, but even if such a process is performed, it is difficult to innovatively reduce the period required for analysis
[0009] Also, using the existing Fourier transformation infrared spectroscopy (FTIR, Fourier transformation infrared spectroscopy) gas analysis equipment and method, correct experimental results have been derived for polyatomic molecules, but the analysis cannot be performed in the case of unit sub-molecules. Achilles' heel

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  • System for measuring, using a QMS, an absolute quantity of each component of a gas
  • System for measuring, using a QMS, an absolute quantity of each component of a gas
  • System for measuring, using a QMS, an absolute quantity of each component of a gas

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Embodiment Construction

[0035] The system for measuring the absolute quantity of different component gases using the quantitative mass system of the present invention for achieving the above-mentioned purpose is characterized in that it includes: a main chamber 100, which stores the sample gas flowing in through a pinhole; a quantitative mass system 200, which It is used to measure the partial pressure of different components of the sample gas stored in the main chamber; the ionization pressure gauge 400, which is connected with the main chamber, measures the vacuum degree of the main chamber in real time; the turbo pump station 800, which is used to discharge The sample gas stored in the main chamber after being measured by the quantitative mass system; the pinhole 700, which allows the sample gas to be input into the quantitative mass system in the state of molecular flow; the first valve 1000, which is arranged on the The pinhole and the pipeline of the molecular chamber are formed; the mass flowme...

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Abstract

The present invention relates to a system for measuring, using a QMS, an absolute quantity of each component of a gas, and more particularly, to a system for measuring, using a QMS, an absolute quantity of each component of a gas, which is capable of performing not only a qualitative analysis but also a quantitative analysis in an accurate manner, using just a trace amount of gas introduced through a pinhole. According to the present invention, the productivity of products can be improved, and production management can be performed in an efficient manner, thereby improving industrial competitiveness.

Description

technical field [0001] The present invention relates to a system for measuring the absolute amount of gases with different components using a quantitative mass system, and in more detail, relates to a system that can not only perform accurate qualitative analysis but also perform quantitative analysis using only a small amount of gas flowing in through a pinhole. The absolute quantity determination system of different component gases of the quality system. Background technique [0002] The basic principle of gas analysis is that when other conditions are constant in PV=nRT (P=pressure, V=volume, n=mole (mole) number, R=gas constant, T=absolute temperature), P is proportional to n, and P of each component can be regarded as a partial pressure or a mole fraction of its component. [0003] Therefore, through an experiment using a standard substance, a sensitivity (sensitivity) inherent to each component is set, and the gas inside the sample is measured using the sensitivity to...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N33/00G01N1/22
CPCG01N7/00H01J49/00G01N33/00G01N1/22
Inventor 尹锡来赵诚权朴原泳李圭璨金辰锡李震馥文东民金光燮
Owner 有限公司益爱儿
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