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Auto-collimator based on differential comparison principle
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An autocollimator and principle technology, which is applied in the direction of instruments, measuring devices, optical devices, etc., can solve the problem of low measurement accuracy of the autocollimator, and achieve the effect of improving measurement accuracy and eliminating errors
Active Publication Date: 2014-06-25
HARBIN INST OF TECH
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[0010] The purpose of the present invention is to solve the problem that the measurement accuracy of the current autocollimator is not high, and propose an autocollimator based on the principle of differential comparison
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specific Embodiment approach 1
[0019] Specific implementation mode one: combine image 3 Describe this embodiment mode, a kind of autocollimator based on differential comparison principle of the present invention, it comprises laser 1, polarizer 2, condenser lens 3, pinhole 4, beam splitter 5, polarization beam splitter 6, collimating mirror 7. λ / 4 wave plate 8, plane mirror 9, corner cube prism 10, first area array CCD11 and second area array CCD12;
[0020] On the optical axis of the light emitted by the laser 1, a polarizer 2, a condenser lens 3, a pinhole 4 and a beam splitter 5 are arranged in sequence. The laser beam emitted by the laser 1 is transmitted by the polarizer 2 and then enters the condenser lens 3, and is focused by the condenser lens 3. To the pinhole 4, the beam passing through the pinhole 4 is incident on the beam splitter 5, the beam reflected by the beam splitter 5 is incident on the polarizing beam splitter 6, and the beam transmitted by the polarizing beam splitter 6 is incident on ...
specific Embodiment approach 2
[0025] Specific embodiment two: this embodiment is a further description of the autocollimator based on the differential comparison principle described in specific embodiment one, the corner cube 10 is arranged on the optical axis of the collimating mirror 7, the corner cube 10 The reflective surface of the reflective surface and the reflective surface of the plane reflector 9 are located on the same plane and are fixedly connected. The corner cube prism 10 can move along the optical axis of the collimator 7 in a one-dimensional manner.
[0026] In this way, the corner cube prism 10 can move together with the plane mirror 9 .
specific Embodiment approach 3
[0027] Embodiment 3: This embodiment is a further description of the autocollimator based on the principle of differential comparison described in Embodiment 2. The moving range of the corner cube prism 10 is 0 to 80 meters.
[0028] The corner cube prism 10 and the plane reflector 9 are fixedly connected, so the corner cube prism 10 moves together with the plane reflector 9 and the object to be measured.
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Abstract
The invention provides an auto-collimator based on a differential comparison principle and relates to an auto-collimator and aims to solve the problem of the low measurement accuracy of the existing auto-collimator. A polarizer, a condenser, a pinhole and a spectroscope are sequentially arranged on an optical axis of the light emitted from a laser; a laser beam emitted from the laser is transmitted by the polarizer, then enters into the condenser, and is focused to the pinhole through the condenser; the light passing through the pinhole enters into the spectroscope; the light reflected by the spectroscope enters into a polarization spectroscope; the light beam transmitted by the polarization spectroscope enters into a collimating mirror; the light beam transmitted by the collimating mirror enters into a plane mirror and a lambda / 4 wave plate; the light beam transmitted by the lambda / 4 wave plate enters into a pyramid prism; the light beam reflected by a plane reflecting mirror turns back along an incident light path and enters into a first area array CCD (charge coupled device) photosurface; the light beam entered into the pyramid prism is reflected and subsequently turns back along the incident light path and then enters into the spectroscope; and the light beam reflected by the polarization spectroscope enters into a photosurface of a second area array CCD. The auto-collimator based on the differential comparison principle provided by the invention serves as an auto-collimator.
Description
technical field [0001] The invention relates to an autocollimator, in particular to an autocollimator based on the principle of differential comparison. Background technique [0002] Autocollimator is a commonly used measurement and testing instrument for small angle measurement or convertible to small angle measurement by using the principle of optical self-collimation. It has unique advantages in realizing multi-dimensional and non-contact measurement of small angles, and is widely used in precision measurements such as angle detection of optical components, flatness detection of platforms, shaking of mechanical shafts, and straightness detection of precision guide rails. [0003] according to figure 1 , the working principle of the autocollimator is as follows: the light beam emitted by the light source is uniformly illuminated by the condenser lens on the cross reticle located on the focal plane of the objective lens. The cross-shaped reticle is imaged on the area arra...
Claims
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