Parallel detection system and method

Abstract

The invention discloses a parallel detection system and a parallel detection method. The system comprises a module to be detected with a unit to be detected, a reference unit and an optical measuring unit. The optical measuring unit comprises an optical measuring module and a displacement module. The lower surface of the unit to be detected is a surface to be detected. The upper surface of the reference unit is a reference surface. The optical measuring module comprises a light source unit, a reflection unit and a sensing unit. The light source unit emits a collimated light beam; the collimated light beam is reflected to the sensing unit sequentially through the surface to be detected, the reflection unit and the reference surface; the sensing unit senses the position of the collimated light beam to calculate a spacing distance between the surface to be detected and the reference surface, and the displacement module is used for moving the optical measuring module to measure the spacing distances between different points; and through a plurality of spacing distances, the parallelism between the surface to be detected and the reference surface can be detected.

Description

technical field [0001] The present invention relates to a parallelism detection system and its method, in particular to a parallelism detection system and its method using optical measurement technology. Background technique [0002] In the field of liquid crystal displays, the pursuit of thinness and high resolution of products is the future trend. Therefore, in the product production process, the accuracy and flatness of the alignment and combination of each component are more important. Therefore, the stability, precision and calibration actions of the production equipment will directly affect the production yield and quality of the product. The method currently used to detect the parallelism of production lamination equipment is generally to use pressure-sensitive paper for detection. [0003] Pressure-sensitive paper is a detection component used to accurately measure the pressure, pressure distribution and pressure uniformity. The pressure-sensitive paper will change ...

AI Technical Summary

Problems solved by technology

[0011] The purpose of the present invention is to overcome the existing problems of using pressure-sensitive paper to measure parallelism, which cannot be reused, is expensive, and cannot be converted into data.

[0012] The secondary purpose of the present invention is to overcome the existing problems of using pressure-sensitive paper to measure parallelism, which cannot be reused, is expensive, and cannot be converted into data.

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