Positioning method of initial zero position of air floatation planar motor
A technology of planar motor and initial zero position, which is applied to the parts of the instrument, instruments, etc., to achieve the effect of a convenient position determination method
Active Publication Date: 2012-11-28
TSINGHUA UNIV +1
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In the actual system, the frictionless suspension support can better achieve fast positioning, but since the mover platform is in a free state before it is controlled, if the influence of cable disturbance is considered, the initial position of the mover platform will also be at An unknown position, considering that the test conditions of many precision measuring equipment require the initial zero position of the mover platform to be in a small range, therefore, the movement method from the initial position to the initial zero position is a problem that needs to be considered and solved
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[0024] The embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.
[0025] figure 1 It is a schematic diagram of the air-floating plane motor system of the present invention, figure 2 is the layout diagram of the permanent magnet array of the stator platform of the present invention, image 3 This is the bottom view of the mover platform of the present invention. The air-floating plane motor includes a stator platform 101 and a mover platform 103. The magnetic steel array 102 is fixedly installed above the stator platform 101. Surface-mounted coil array 200, the coil array 200 includes four groups of three-phase coils with the same structure, wherein the long sides of the first group of coils 201 and the third group of coils 203 are along the Y direction, the second group of coils 202 and the fourth group of coils 204 The long side is along the X direction, and each group of three-phase coils adopts a star...
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The invention relates to a positioning method of an initial zero position of an air flotation planar motor. The air flotation planar motor comprises a stator platform and a rotor platform, wherein a planar magnetic steel array is fixedly mounted above the stator platform, the rotor platform adopts air flotation for supporting, four groups of three-phase coils with the same structure are fixedly mounted on the lower surface of the rotor platform, the long sides of the first and the third groups of the coils are arranged along the Y direction, the long sides of the second and the fourth groups of the coils are arranged along the X direction, each coil adopts a star-shaped connection way, the initial zero position has no corner in a coil coordinate system and a magnetic field coordinate system, and the positioning method comprises the following steps: adopting a driving device to input current with a certain rule into any two groups of the coils in different directions, further driving the rotor platform to move, enabling the two groups of the coils to achieve balanced positions and finally realizing the positioning of the rotor platform to the initial zero position. The invention provides a simple, convenient and fast initial zero position determining method for an air flotation permanent magnet planar motor system, which can provide necessary working conditions for normal working of measurement equipment for a rotor platform control system.
Description
technical field [0001] The invention relates to a positioning method of a plane motor mover platform, in particular to a method for determining the initial zero position of a plane motor mover platform in an air-floating support manner, and belongs to the technical field of mechanical control. Background technique [0002] With the rapid development of advanced manufacturing industry, in modern semiconductor processing equipment, micro-stereolithography, nano-table and other micro-precision processing equipment, the large-stroke motion is realized by linear motors, and the high-precision motion is realized by high-precision planar motors. accomplish. [0003] There are many bearing support methods for the high-precision planar motor mover platform. In order to realize the fast and accurate positioning of the high-precision planar motor, it is necessary to realize the frictionless suspension support of the mover platform. At present, there are mainly four types of frictionle...
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IPC IPC(8): G12B5/00
Inventor 杨开明朱煜蒋毅成荣张鸣余东东穆海华胡金春李鑫尹文生
Owner TSINGHUA UNIV