Positioning method of initial zero position of air floatation planar motor
A technology of planar motor and initial zero position, which is applied to the parts of the instrument, instruments, etc., to achieve the effect of a convenient position determination method
Active Publication Date: 2012-11-28
TSINGHUA UNIV +1
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Problems solved by technology
In the actual system, the frictionless suspension support can better achieve fast positioning, but since the mover platform is in a free state before it is controlled, if the influence of cable disturbance is considered, the initial position of the mover platform will also be at An unknown position, considering that the test conditions of many precision measuring equipment require the initial zero position of the mover platform to be in a small range, therefore, the movement method from the initial position to the initial zero position is a problem that needs to be considered and solved
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[0024] The embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0025] figure 1 It is a schematic diagram of the air-floating planar motor system of the present invention, figure 2 It is the layout diagram of the permanent magnet array of the stator platform of the present invention, image 3 It is a bottom view of the mover platform of the present invention. The air-floating planar motor includes a stator platform 101 and a mover platform 103. A magnetic steel array 102 is fixedly installed above the stator platform 101. The mover platform 103 adopts an air bearing 204. The lower surface of the mover platform 103 is Install the coil array 201, and two first adjustment coil groups 202 and second adjustment coil groups 203 with the same structure, the two adjustment coil groups are three-phase coils, connected in star form, all arranged on the same line along the X direction Above, the initial zero po...
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The invention relates to a positioning method of an initial zero position of an air flotation planar motor. The air flotation planar motor comprises a stator platform and a rotor platform, wherein a planar magnetic steel array is fixedly mounted above the stator platform, the rotor platform adopts air flotation for supporting, two groups of three-phase adjusting coils with the same structure are fixedly mounted on the lower surface of the rotor platform, and the first adjusting coil group and the second adjusting coil group are arranged along the X direction. The initial zero position has no corner in a coil coordinate system and a magnetic field coordinate system, and the positioning method comprises the following steps: adopting a driving device to input current with a certain rule into the two groups of the coils, further driving the rotor platform to move, enabling the two groups of the coils to achieve balanced positions and finally realizing the positioning of the rotor platform to the initial zero position. The invention provides a simple, convenient and fast initial zero position determining method for an air flotation permanent magnet planar motor system, which can provide necessary working conditions for normal working of measurement equipment for a rotor platform control system.
Description
technical field [0001] The invention relates to a positioning method for a planar motor, in particular to a method for determining the initial zero position of a planar motor supported by air. Background technique [0002] With the rapid development of advanced manufacturing industry, in modern semiconductor processing equipment, micro-stereolithography, nano-table and other micro-precision processing equipment, large-stroke motion is realized by linear motors, while high-precision motion is realized by high-precision planar motors accomplish. [0003] There are many bearing support methods for the high-precision planar motor mover platform. In order to realize the fast and accurate positioning of the high-precision planar motor, it is necessary to realize the frictionless suspension support of the mover platform. At present, there are mainly four kinds of frictionless levitation support technologies: electric levitation, superconducting levitation, gas levitation and magne...
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IPC IPC(8): G12B5/00
Inventor 朱煜杨开明蒋毅成荣张鸣余东东李鑫尹文生胡金春穆海华
Owner TSINGHUA UNIV