Positioning method of initial zero position of air floatation planar motor

Abstract

The invention relates to a positioning method of an initial zero position of an air flotation planar motor. The air flotation planar motor comprises a stator platform and a rotor platform, wherein a planar magnetic steel array is fixedly mounted above the stator platform, the rotor platform adopts air flotation for supporting, four groups of three-phase coils with the same structure are fixedly mounted on the lower surface of the rotor platform, the long sides of the first and the third groups of the coils are arranged along the Y direction, the long sides of the second and the fourth groups of the coils are arranged along the X direction, each coil adopts a star-shaped connection way, the initial zero position has no corner in a coil coordinate system and a magnetic field coordinate system, and the positioning method comprises the following steps: adopting a driving device to input current with a certain rule into any two groups of the coils in different directions, further driving the rotor platform to move, enabling the two groups of the coils to achieve balanced positions and finally realizing the positioning of the rotor platform to the initial zero position. The invention provides a simple, convenient and fast initial zero position determining method for an air flotation permanent magnet planar motor system, which can provide necessary working conditions for normal working of measurement equipment for a rotor platform control system.

Description

technical field [0001] The invention relates to a positioning method for a planar motor mover platform, in particular to a method for determining the initial zero position of a planar motor mover platform in an air-floating support mode, and belongs to the technical field of mechanical control. Background technique [0002] With the rapid development of advanced manufacturing industry, in modern semiconductor processing equipment, micro-stereolithography, nano-table and other micro-precision processing equipment, large-stroke motion is realized by linear motors, while high-precision motion is realized by high-precision planar motors accomplish. [0003] There are many bearing support methods for the high-precision planar motor mover platform. In order to realize the fast and accurate positioning of the high-precision planar motor, it is necessary to realize the frictionless suspension support of the mover platform. At present, there are mainly four kinds of frictionless sus...

AI Technical Summary

Problems solved by technology

In the actual system, the frictionless suspension support can better achieve fast positioning, but since the mover platform is in a free state before it is controlled, if the influence of cable disturbance is considered, the initial position of the mover platform will also be at An unknown position, considering that the test conditions of many precision measuring equipment require the initial zero position of the mover platform to be in a small range, therefore, the movement method from the initial position to the initial zero position is a problem that needs to be considered and solved

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