Extreme flow rate and/or high temperature fluid delivery substrates
A technology of fluid substrates and substrates, which is applied in the directions of transportation and packaging, pipe/pipe joints/fittings, semiconductor/solid-state device manufacturing, etc., to achieve the effect of eliminating the need and stabilizing mechanical alignment
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[0098] The invention is not limited in its application to the details of construction and the arrangement of parts set forth in the following description and illustrated in the drawings. The invention is capable of other embodiments and of being practiced or carried out in various ways. Also, the phraseology and terminology used herein are for the purpose of description and should not be regarded as limiting.
[0099] It should be appreciated that the fluid material manipulated with the fluid delivery flow substrate of the present invention may be a gaseous, liquid or vaporous substance that can change between liquid and gaseous states depending on the temperature and pressure specified for the substance. Representative fluid substances might be pure elements such as argon (Ar); vaporous compounds such as boron trichloride (BCl 3 ), usually liquid silicon tetrachloride (SiCl 4 ) in a carrier gas or in an aqueous reactant.
[0100] Figure 1A-J illustrates a modular flow mat...
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