Substrate transfer hand and substrate transfer device including the substrate transfer hand
A transmission device and transmission hand technology, applied in the direction of transportation and packaging, manipulators, conveyor objects, etc., can solve problems such as difficult fork insertion, fork strength reduction, vibration, etc.
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[0032] A substrate transfer hand and a substrate transfer device including the substrate transfer hand according to one embodiment of the present invention will now be described with reference to the accompanying drawings. The invention is not limited to the embodiments described.
[0033] In the following description, the substrate transfer hand is sometimes referred to as "hand". Hereinafter, a case where a typical wire box is used as the box will be described. The wire box is sometimes referred to as a "box".
[0034] First, refer to Figure 1A A substrate transfer system including a substrate transfer hand and a substrate transfer device according to the present embodiment will be briefly described. Figure 1A is a schematic diagram showing a substrate transfer system 1 including a fork-shaped substrate transfer hand 15 and a substrate transfer device 10 according to the present embodiment. For easier understanding, Figure 1A A three-dimensional orthogonal coordinate sy...
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