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Substrate transfer hand and substrate transfer device including the substrate transfer hand

A transmission device and transmission hand technology, applied in the direction of transportation and packaging, manipulators, conveyor objects, etc., can solve problems such as difficult fork insertion, fork strength reduction, vibration, etc.

Inactive Publication Date: 2012-12-19
YASKAWA DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In the case where the storage efficiency of the cassettes is improved in the above-mentioned manner, there is a problem in the conventional substrate transfer hand in that it is difficult to insert the forks into the cassettes with the reduced substrate pitch.
However, this solution is not ideal because the reduction in the thickness of the fork tends to reduce the strength of the fork or cause vibration

Method used

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  • Substrate transfer hand and substrate transfer device including the substrate transfer hand
  • Substrate transfer hand and substrate transfer device including the substrate transfer hand
  • Substrate transfer hand and substrate transfer device including the substrate transfer hand

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Embodiment Construction

[0032] A substrate transfer hand and a substrate transfer device including the substrate transfer hand according to one embodiment of the present invention will now be described with reference to the accompanying drawings. The invention is not limited to the embodiments described.

[0033] In the following description, the substrate transfer hand is sometimes referred to as "hand". Hereinafter, a case where a typical wire box is used as the box will be described. The wire box is sometimes referred to as a "box".

[0034] First, refer to Figure 1A A substrate transfer system including a substrate transfer hand and a substrate transfer device according to the present embodiment will be briefly described. Figure 1A is a schematic diagram showing a substrate transfer system 1 including a fork-shaped substrate transfer hand 15 and a substrate transfer device 10 according to the present embodiment. For easier understanding, Figure 1A A three-dimensional orthogonal coordinate sy...

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Abstract

A substrate transfer hand for unloading and loading a substrate with respect to a cassette and transferring the substrate, includes: a first driven roller configured to be rotated by a drive mechanism provided in the cassette when the hand is coupled to the cassette along a substrate unloading / loading direction. The substrate transfer hand further includes: a flat support bar configured to be coupled to the cassette; a second driven roller provided in the support bar; and a rotation transmitting unit for transmitting rotation of the first driven roller to the second driven roller such that the second driven roller is rotated in the same direction as the first driven roller.

Description

technical field [0001] The present invention relates to a substrate transfer hand and a substrate transfer device including the substrate transfer hand. Background technique [0002] Conventionally, there is known a substrate transfer device for transferring a flat substrate such as a glass substrate of a liquid crystal panel and loading or unloading the flat substrate into or from a storage box. [0003] The substrate transfer device includes a substrate transfer hand having a plurality of plate-shaped forks. The substrate transfer device is designed for transferring substrates placed on the forks. In addition, the substrate transfer device loads or unloads the substrate into or from a storage cassette (hereinafter referred to as "cassette") by inserting the fork into the cassette. [0004] Generally, the box includes: a box-shaped case having an open side; and pairs of bracket members arranged in a plurality of stages on sides of the case facing each other . The substr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677B65G49/06B25J9/16
CPCH01L21/67778H01L21/67766B65G49/067B65G49/061B65G49/068B65G49/064
Inventor 古田诚仲子透山崎哲也
Owner YASKAWA DENKI KK