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High-accuracy resetting technology-based damage threshold measuring method and device

A damage threshold and measurement method technology, applied to measuring devices, material analysis through optical means, instruments, etc., can solve the problems of actual coordinates and read coordinates deviation, coordinate position deviation, reduce the accuracy of damage point coordinate recognition, etc., to achieve The effect of high accuracy of damage identification and simple structure of the device

Active Publication Date: 2015-01-14
TONGJI UNIV
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the photoelectric signal detection technology is an indirect identification method, which cannot directly obtain the relevant data of the damage point, and its recognition accuracy is limited by the intensity of scattered light at the damage point and the signal calibration accuracy; in addition, due to changes in the photoelectric signal, Damage judgment and motor coordinate reading involve multiple software analysis processes, which will introduce a certain calculation time and delay time, resulting in deviations between the actual coordinates and the read coordinates
Especially when the motor is moving at high speed, the speed is generally greater than 2mm / s. At this time, every 1ms delay will cause a coordinate position deviation of at least 2μm, and the process of data collection, analysis and judgment will generally cause several ms, or even tens of ms delay, thus greatly reducing the recognition accuracy of damage point coordinates

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Embodiment Construction

[0034] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0035] Such as figure 1 As shown, a damage threshold measurement method based on high-precision reset technology, the method includes the following steps:

[0036] In step S101, the sample to be tested is fixed on the electric translation stage, the electric translation stage controls the sample to be tested to move on a grating track, the illumination source illuminates the sample to be tested, and the online microscope is aligned with the pump laser to irradiate the sample to be tested. Location;

[0037] In step S102, before the pump laser is irradiated, the computer collects pictures of each measurement point of the sample to obtain a set of image sequences, denoted as N 0xy , the obtained image is as Figure 2a shown.

[0038] Described each measurement point of tested sample is carried out picture collection specifically is:

[003...

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Abstract

The invention relates to a high-accuracy resetting technology-based damage threshold measuring method and device. The high-accuracy resetting technology-based damage threshold measuring method comprises the following steps of: fixing a tested sample on an electric translation table to obtain an image sequence of each measuring point of the tested sample before and after radiation of a pumping laser; comparing the image sequences obtained before and after radiation, judging whether the sample is damaged according to the difference, controlling the tested sample to return to the position in which damage occurs and performing one-step check on a damage point; and improving the energy of the pumping laser, and repeatedly obtaining the image sequence of the tested sample after radiation to realize measurement of the same region of the tested sample under radiation of different energies of the pumping laser. The high-accuracy resetting technology-based damage threshold measuring device comprises the pumping laser, the electric translation table, a lighting source and a damage monitoring component, wherein the pumping laser is used for emitting pumping laser; the electric translation table is used for driving the tested sample to move; and the damage monitoring component is used for real-time monitoring and acquisition of an image of the tested sample. Compared with the prior art, the measuring device has the advantages of high damage recognition accuracy, simple device structure and the like.

Description

technical field [0001] The invention relates to a method and a device for testing the laser damage resistance of an optical element, in particular to a method and a device for measuring a damage threshold based on a high-precision reset technology. Background technique [0002] Optical components are widely used in laser processing, laser weapons, and high-power laser systems, and are essential components in optical systems. With the continuous improvement of laser output energy, the laser damage threshold of optical components has become a key factor restricting the further development of strong laser technology, and it is also a weak link that restricts the development of laser technology in the direction of high energy and high power. In order to deeply analyze the damage performance and damage mechanism of optical components and accurately evaluate the laser damage resistance of optical components, it is necessary to continuously develop and improve the measurement techn...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/84
Inventor 马彬张艳云马宏平程鑫彬焦宏飞王占山
Owner TONGJI UNIV